JPH0466094B2 - - Google Patents

Info

Publication number
JPH0466094B2
JPH0466094B2 JP10531085A JP10531085A JPH0466094B2 JP H0466094 B2 JPH0466094 B2 JP H0466094B2 JP 10531085 A JP10531085 A JP 10531085A JP 10531085 A JP10531085 A JP 10531085A JP H0466094 B2 JPH0466094 B2 JP H0466094B2
Authority
JP
Japan
Prior art keywords
wafer
pattern
mask
section
mask plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10531085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61263124A (ja
Inventor
Yutaka Kadonishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP60105310A priority Critical patent/JPS61263124A/ja
Publication of JPS61263124A publication Critical patent/JPS61263124A/ja
Publication of JPH0466094B2 publication Critical patent/JPH0466094B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP60105310A 1985-05-16 1985-05-16 半導体装置製造用のマスク板 Granted JPS61263124A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60105310A JPS61263124A (ja) 1985-05-16 1985-05-16 半導体装置製造用のマスク板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60105310A JPS61263124A (ja) 1985-05-16 1985-05-16 半導体装置製造用のマスク板

Publications (2)

Publication Number Publication Date
JPS61263124A JPS61263124A (ja) 1986-11-21
JPH0466094B2 true JPH0466094B2 (enExample) 1992-10-22

Family

ID=14404129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60105310A Granted JPS61263124A (ja) 1985-05-16 1985-05-16 半導体装置製造用のマスク板

Country Status (1)

Country Link
JP (1) JPS61263124A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003022987A (ja) * 2001-07-09 2003-01-24 Sanyo Electric Co Ltd 化合物半導体装置の製造方法

Also Published As

Publication number Publication date
JPS61263124A (ja) 1986-11-21

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