JPH0372011B2 - - Google Patents

Info

Publication number
JPH0372011B2
JPH0372011B2 JP60046782A JP4678285A JPH0372011B2 JP H0372011 B2 JPH0372011 B2 JP H0372011B2 JP 60046782 A JP60046782 A JP 60046782A JP 4678285 A JP4678285 A JP 4678285A JP H0372011 B2 JPH0372011 B2 JP H0372011B2
Authority
JP
Japan
Prior art keywords
zinc oxide
transparent conductive
conductive film
oxide transparent
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60046782A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61205619A (ja
Inventor
Uchitsugu Minami
Shinzo Takada
Hidehito Minamido
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OOSAKA TOKUSHU GOKIN KK
Original Assignee
OOSAKA TOKUSHU GOKIN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OOSAKA TOKUSHU GOKIN KK filed Critical OOSAKA TOKUSHU GOKIN KK
Priority to JP60046782A priority Critical patent/JPS61205619A/ja
Publication of JPS61205619A publication Critical patent/JPS61205619A/ja
Publication of JPH0372011B2 publication Critical patent/JPH0372011B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Non-Insulated Conductors (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Physical Vapour Deposition (AREA)
JP60046782A 1985-03-08 1985-03-08 耐熱性酸化亜鉛透明導電膜 Granted JPS61205619A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60046782A JPS61205619A (ja) 1985-03-08 1985-03-08 耐熱性酸化亜鉛透明導電膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60046782A JPS61205619A (ja) 1985-03-08 1985-03-08 耐熱性酸化亜鉛透明導電膜

Publications (2)

Publication Number Publication Date
JPS61205619A JPS61205619A (ja) 1986-09-11
JPH0372011B2 true JPH0372011B2 (en, 2012) 1991-11-15

Family

ID=12756897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60046782A Granted JPS61205619A (ja) 1985-03-08 1985-03-08 耐熱性酸化亜鉛透明導電膜

Country Status (1)

Country Link
JP (1) JPS61205619A (en, 2012)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008044469A1 (fr) 2006-10-06 2008-04-17 Sakai Chemical Industry Co., Ltd. Particule ultrafine d'oxyde de zinc et son procédé de production
JP2011171304A (ja) * 2006-01-11 2011-09-01 Murata Mfg Co Ltd 透明導電膜
JP5145228B2 (ja) * 2006-07-28 2013-02-13 株式会社アルバック 透明導電膜の成膜方法

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5776353A (en) * 1996-02-16 1998-07-07 Advanced Minerals Corporation Advanced composite filtration media
JPS6433811A (en) * 1987-04-04 1989-02-03 Gunze Kk Transparent conductive film and its manufacture
JPH01201021A (ja) * 1988-02-04 1989-08-14 Bridgestone Corp 熱線遮蔽材料及び熱線遮蔽ガラス
JPH01242417A (ja) * 1988-03-25 1989-09-27 Mitsubishi Metal Corp 透明導電性酸化亜鉛膜の製造方法
KR100306565B1 (ko) * 1992-12-15 2001-11-30 도미나가 가즈토 투명도전막과그의제조방법,투명도전막이형성된도전성투명필름과도전성투명유리,및도전성재료
WO2003022954A1 (en) * 2001-09-10 2003-03-20 Japan Represented By President Of Tokyo Institute Of Technology Method for producing ultraviolet absorbing material
BRPI0608275A2 (pt) * 2005-02-24 2009-12-15 Sekisui Chemical Co Ltd óxido de zinco contendo gálio
US7699965B2 (en) 2006-03-17 2010-04-20 Nippon Mining & Metals Co., Ltd. Zinc oxide-based transparent conductor and sputtering target for forming the transparent conductor
TWI309050B (en) * 2006-04-03 2009-04-21 Ind Tech Res Inst Azo transparent conducting film with metallic nano particles and method of producing thereof
US8007693B2 (en) 2006-08-24 2011-08-30 Jx Nippon Mining & Metals Corporation Zinc oxide based transparent electric conductor, sputtering target for forming of the conductor and process for producing the target
JP5334246B2 (ja) * 2007-10-19 2013-11-06 ハクスイテック株式会社 酸化亜鉛系薄膜製造用のイオンプレーティング用ターゲット
JP5376116B2 (ja) * 2007-10-30 2013-12-25 三菱マテリアル株式会社 ＺｎＯ蒸着材とその製造方法
JP5376117B2 (ja) * 2007-10-30 2013-12-25 三菱マテリアル株式会社 ＺｎＯスパッタリングターゲットとその製造方法
US8197908B2 (en) 2008-03-14 2012-06-12 Hestia Tec, Llc Method for preparing electrically conducting materials
WO2010026899A1 (ja) 2008-09-04 2010-03-11 株式会社カネカ 透明電極付き基板および透明電極付き基板の製造方法
JP5740992B2 (ja) * 2011-01-14 2015-07-01 東ソー株式会社 酸化物焼結体、それから成るターゲットおよび透明導電膜
JP6709171B2 (ja) * 2014-12-09 2020-06-10 リンテック株式会社 透明導電膜及び透明導電膜の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5023918A (en, 2012) * 1973-07-02 1975-03-14
JPS515360A (ja) * 1974-07-02 1976-01-17 Yoshiaki Sakai Horiesuterukeshobanno seizoho

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011171304A (ja) * 2006-01-11 2011-09-01 Murata Mfg Co Ltd 透明導電膜
JP5145228B2 (ja) * 2006-07-28 2013-02-13 株式会社アルバック 透明導電膜の成膜方法
WO2008044469A1 (fr) 2006-10-06 2008-04-17 Sakai Chemical Industry Co., Ltd. Particule ultrafine d'oxyde de zinc et son procédé de production

Also Published As

Publication number Publication date
JPS61205619A (ja) 1986-09-11

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