JPH0353692B2 - - Google Patents

Info

Publication number
JPH0353692B2
JPH0353692B2 JP56207996A JP20799681A JPH0353692B2 JP H0353692 B2 JPH0353692 B2 JP H0353692B2 JP 56207996 A JP56207996 A JP 56207996A JP 20799681 A JP20799681 A JP 20799681A JP H0353692 B2 JPH0353692 B2 JP H0353692B2
Authority
JP
Japan
Prior art keywords
magnetic
magnetic film
deposited
film
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56207996A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58111127A (ja
Inventor
Kyuzo Nakamura
Yoshifumi Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP56207996A priority Critical patent/JPS58111127A/ja
Priority to US06/451,733 priority patent/US4581245A/en
Priority to DE3247831A priority patent/DE3247831C2/de
Publication of JPS58111127A publication Critical patent/JPS58111127A/ja
Priority to US06/746,169 priority patent/US4655167A/en
Publication of JPH0353692B2 publication Critical patent/JPH0353692B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/72—Protective coatings, e.g. anti-static or antifriction
    • G11B5/725—Protective coatings, e.g. anti-static or antifriction containing a lubricant, e.g. organic compounds
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Magnetic Record Carriers (AREA)
JP56207996A 1981-12-24 1981-12-24 耐摩耗性磁気記録体の製造法 Granted JPS58111127A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP56207996A JPS58111127A (ja) 1981-12-24 1981-12-24 耐摩耗性磁気記録体の製造法
US06/451,733 US4581245A (en) 1981-12-24 1982-12-21 Method of manufacturing of abrasion resisting magnetic recording product
DE3247831A DE3247831C2 (de) 1981-12-24 1982-12-23 Verfahren und Gerät zur Herstellung eines abriebfesten magnetischen Aufzeichnungsprodukts
US06/746,169 US4655167A (en) 1981-12-24 1985-06-18 Apparatus for manufacturing of abrasion resistant magnetic recording product

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56207996A JPS58111127A (ja) 1981-12-24 1981-12-24 耐摩耗性磁気記録体の製造法

Publications (2)

Publication Number Publication Date
JPS58111127A JPS58111127A (ja) 1983-07-02
JPH0353692B2 true JPH0353692B2 (enrdf_load_stackoverflow) 1991-08-15

Family

ID=16548945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56207996A Granted JPS58111127A (ja) 1981-12-24 1981-12-24 耐摩耗性磁気記録体の製造法

Country Status (3)

Country Link
US (2) US4581245A (enrdf_load_stackoverflow)
JP (1) JPS58111127A (enrdf_load_stackoverflow)
DE (1) DE3247831C2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111570227A (zh) * 2020-05-15 2020-08-25 中国科学院兰州化学物理研究所 一种硬脂酸钾边界润滑薄膜的制备及在真空电接触运动部件上的应用

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59154643A (ja) * 1983-02-24 1984-09-03 Fuji Photo Film Co Ltd 磁気記録媒体
EP0122092A3 (en) * 1983-04-06 1985-07-10 General Engineering Radcliffe Limited Vacuum coating apparatus
JPS60138720A (ja) * 1983-12-27 1985-07-23 Sharp Corp 垂直磁気記録媒体
GB8408023D0 (en) * 1984-03-28 1984-05-10 Gen Eng Radcliffe Ltd Vacuum coating apparatus
JPH0612566B2 (ja) * 1984-08-01 1994-02-16 ティーディーケイ株式会社 磁気記録方法
US5223307A (en) * 1984-11-28 1993-06-29 Helmuth Schmoock Packaging foil, and method for the production thereof
US4729924A (en) * 1984-12-21 1988-03-08 Minnesota Mining And Manufacturing Company Metallic thin film magnetic recording medium having a hard protective layer
US4803130A (en) * 1984-12-21 1989-02-07 Minnesota Mining And Manufacturing Company Reactive sputtering process for recording media
US4994321A (en) * 1986-01-24 1991-02-19 Fuji Photo Film Co., Ltd. Perpendicular magnetic recording medium and the method for preparing the same
JPS62183023A (ja) * 1986-02-05 1987-08-11 Tdk Corp 磁気記録媒体
JPS62229519A (ja) * 1986-03-29 1987-10-08 Canon Inc 磁気記録媒体
JP2532209B2 (ja) * 1986-04-04 1996-09-11 ティーディーケイ株式会社 磁気記録媒体
US4889767A (en) * 1986-04-23 1989-12-26 Tdk Corporation Magnetic recording medium
US4841908A (en) * 1986-06-23 1989-06-27 Minnesota Mining And Manufacturing Company Multi-chamber deposition system
IL82673A0 (en) * 1986-06-23 1987-11-30 Minnesota Mining & Mfg Multi-chamber depositions system
DE3641718A1 (de) * 1986-12-06 1988-06-16 Leybold Ag Verfahren zum herstellen von wickeln aus im vakuum leitfaehig beschichteten isolierstoff-folien
US4814056A (en) * 1987-06-23 1989-03-21 Vac-Tec Systems, Inc. Apparatus for producing graded-composition coatings
EP0311302B1 (en) * 1987-10-07 1992-06-24 THORN EMI plc Apparatus and method for the production of a coating on a web
DE3738722C2 (de) * 1987-11-14 1995-12-14 Leybold Ag Vorrichtung zum beidseitigen Beschichten von Bändern
US5225057A (en) * 1988-02-08 1993-07-06 Optical Coating Laboratory, Inc. Process for depositing optical films on both planar and non-planar substrates
US5618388A (en) * 1988-02-08 1997-04-08 Optical Coating Laboratory, Inc. Geometries and configurations for magnetron sputtering apparatus
US5798027A (en) * 1988-02-08 1998-08-25 Optical Coating Laboratory, Inc. Process for depositing optical thin films on both planar and non-planar substrates
US5001939A (en) * 1988-08-04 1991-03-26 Minnesota Mining And Manufacturing Co. Surface characterization apparatus and method
US5053625A (en) * 1988-08-04 1991-10-01 Minnesota Mining And Manufacturing Company Surface characterization apparatus and method
JPH0833996B2 (ja) * 1989-09-26 1996-03-29 松下電器産業株式会社 磁気記録媒体の製造方法
ATE125392T1 (de) * 1990-05-10 1995-08-15 Eastman Kodak Co Gerät zur plasmabehandlung eines durchgehenden materials.
JPH0788578B2 (ja) * 1991-07-10 1995-09-27 財団法人国際超電導産業技術研究センター 酸化物薄膜の製造方法および装置
ATE252268T1 (de) * 1991-12-27 2003-11-15 Honeywell Int Inc Anordnung mehrschichtiger filmmaterialien
US5331487A (en) * 1992-01-16 1994-07-19 International Business Machines Corporation Direct access storage device with vapor phase lubricant system and a magnetic disk having a protective layer and immobile physically bonded lubricant layer
DE4207525C2 (de) * 1992-03-10 1999-12-16 Leybold Ag Hochvakuum-Beschichtungsanlage
EP0561243B1 (en) * 1992-03-13 1997-08-13 Matsushita Electric Industrial Co., Ltd. Plasma CVD apparatus and method therefor
DE4222013A1 (de) * 1992-07-04 1994-01-05 Leybold Ag Vorrichtung zur Vakuumbeschichtung von Folien
DE4227873A1 (de) * 1992-08-22 1994-02-24 Leybold Ag Verfahren und Vorrichtung zum kontinuierlichen Beschichten von nichtleitenden Folien im Vakuum
JP3175894B2 (ja) * 1994-03-25 2001-06-11 株式会社半導体エネルギー研究所 プラズマ処理装置及びプラズマ処理方法
US5743966A (en) * 1996-05-31 1998-04-28 The Boc Group, Inc. Unwinding of plastic film in the presence of a plasma
US6214410B1 (en) * 1997-09-09 2001-04-10 Seagate Technology Llc Vacuum assisted lubrication of magnetic recording media
US6183831B1 (en) * 1998-08-20 2001-02-06 Intevac, Inc. Hard disk vapor lube
DE69921573T2 (de) * 1998-09-17 2005-12-01 Toray Industries, Inc. Verfahren zum Lagern von Polyesterfolie für magnetisches Aufzeichnungsmedium und Verfahren zur Herstellung eines magnetischen Aufzeichnungsmediums
DE19935181C5 (de) * 1999-07-27 2004-05-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Schutz eines vakuumtechnisch bearbeiteten Substrates und Verwendung des Verfahrens
US20060141244A1 (en) * 2004-12-29 2006-06-29 Toray Industries, Inc. Multilayer film and process for producing the same

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3181209A (en) * 1961-08-18 1965-05-04 Temescal Metallurgical Corp Foil production
US4015558A (en) * 1972-12-04 1977-04-05 Optical Coating Laboratory, Inc. Vapor deposition apparatus
GB1599161A (en) * 1976-07-15 1981-09-30 Matsushita Electric Ind Co Ltd Magnetic recording medium and method of making the same
GB1596385A (en) * 1976-12-29 1981-08-26 Matsushita Electric Ind Co Ltd Methods and apparatus for manufacturing magnetic recording media
JPS54113303A (en) * 1978-02-24 1979-09-04 Ulvac Corp Magnetic record having metal thin film
JPS54154306A (en) * 1978-05-26 1979-12-05 Ulvac Corp Wear resistant magnetic record and method of fabricating same
DE3024918A1 (de) * 1979-07-02 1981-01-22 Fuji Photo Film Co Ltd Magnetisches aufzeichnungsmaterial und verfahren zu dessen herstellung
JPS567232A (en) * 1979-07-02 1981-01-24 Fuji Photo Film Co Ltd Production of magnetic recording medium
JPS567238A (en) * 1979-07-02 1981-01-24 Fuji Photo Film Co Ltd Production of magnetic recording medium
US4403002A (en) * 1979-12-10 1983-09-06 Fuji Photo Film Co., Ltd. Vacuum evaporating apparatus
JPS57186231A (en) * 1981-05-13 1982-11-16 Matsushita Electric Ind Co Ltd Manufacture for magnetic recording medium

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111570227A (zh) * 2020-05-15 2020-08-25 中国科学院兰州化学物理研究所 一种硬脂酸钾边界润滑薄膜的制备及在真空电接触运动部件上的应用

Also Published As

Publication number Publication date
US4581245A (en) 1986-04-08
JPS58111127A (ja) 1983-07-02
DE3247831C2 (de) 1985-01-17
DE3247831A1 (de) 1983-07-14
US4655167A (en) 1987-04-07

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