JPH0352179B2 - - Google Patents

Info

Publication number
JPH0352179B2
JPH0352179B2 JP55112544A JP11254480A JPH0352179B2 JP H0352179 B2 JPH0352179 B2 JP H0352179B2 JP 55112544 A JP55112544 A JP 55112544A JP 11254480 A JP11254480 A JP 11254480A JP H0352179 B2 JPH0352179 B2 JP H0352179B2
Authority
JP
Japan
Prior art keywords
sample
scanning
electron
display means
transmission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55112544A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5736764A (en
Inventor
Yasushi Kokubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP11254480A priority Critical patent/JPS5736764A/ja
Publication of JPS5736764A publication Critical patent/JPS5736764A/ja
Publication of JPH0352179B2 publication Critical patent/JPH0352179B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP11254480A 1980-08-15 1980-08-15 Scan electron microscope Granted JPS5736764A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11254480A JPS5736764A (en) 1980-08-15 1980-08-15 Scan electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11254480A JPS5736764A (en) 1980-08-15 1980-08-15 Scan electron microscope

Publications (2)

Publication Number Publication Date
JPS5736764A JPS5736764A (en) 1982-02-27
JPH0352179B2 true JPH0352179B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-09

Family

ID=14589299

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11254480A Granted JPS5736764A (en) 1980-08-15 1980-08-15 Scan electron microscope

Country Status (1)

Country Link
JP (1) JPS5736764A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01166453A (ja) * 1987-12-23 1989-06-30 Kawasaki Steel Corp コッセル像観察装置
JP5170728B2 (ja) * 2005-12-13 2013-03-27 サンユー電子株式会社 画像生成方法および画像生成装置
JP5502612B2 (ja) * 2010-06-17 2014-05-28 日本電子株式会社 荷電粒子ビーム装置

Also Published As

Publication number Publication date
JPS5736764A (en) 1982-02-27

Similar Documents

Publication Publication Date Title
US4211924A (en) Transmission-type scanning charged-particle beam microscope
US3585382A (en) Stereo-scanning electron microscope
US4399360A (en) Transmission electron microscope employing sequential pixel acquistion for display
JPS614144A (ja) 電子顕微鏡による回折パタ−ン表示方法
JPH0352179B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP3751841B2 (ja) 電子線を用いた検査装置及び電子線を用いた検査方法
JP4129088B2 (ja) 走査透過電子顕微鏡
JPH04259743A (ja) 走査型反射電子回折顕微鏡
JP2775928B2 (ja) 表面分析装置
JPS6040137B2 (ja) 走査電子顕微鏡
JPH01149354A (ja) 電子顕微鏡
JPS60138252U (ja) 粒子線装置における試料画像表示装置
JPS5827621B2 (ja) 走査電子顕微鏡
JPS5954160A (ja) 荷電粒子線装置
JPS59153154A (ja) 電子線分析方法及び装置
JPS6016062B2 (ja) 走査形電子顕微鏡
JPS59224038A (ja) 荷電粒子線走査型分析装置
KR830002115B1 (ko) 입자선을 사용한 시료분석 장치
JPS6055250A (ja) ルミネッセンス検出装置
SU884005A1 (ru) Способ измерени диаметра электронного зонда в растровом электронном микроскопе
JPS6235218B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH05258704A (ja) 走査型電子顕微鏡
JPS5851452A (ja) 分析電子顕微鏡
JPS6352427B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0326048U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)