JPS6352427B2 - - Google Patents
Info
- Publication number
- JPS6352427B2 JPS6352427B2 JP57089097A JP8909782A JPS6352427B2 JP S6352427 B2 JPS6352427 B2 JP S6352427B2 JP 57089097 A JP57089097 A JP 57089097A JP 8909782 A JP8909782 A JP 8909782A JP S6352427 B2 JPS6352427 B2 JP S6352427B2
- Authority
- JP
- Japan
- Prior art keywords
- image
- electron beam
- diffraction
- sample
- solid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 16
- 238000003384 imaging method Methods 0.000 claims description 3
- 239000011521 glass Substances 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 7
- 239000003973 paint Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000003365 glass fiber Substances 0.000 description 2
- 230000004660 morphological change Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57089097A JPS58206036A (ja) | 1982-05-26 | 1982-05-26 | 電子顕微鏡 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57089097A JPS58206036A (ja) | 1982-05-26 | 1982-05-26 | 電子顕微鏡 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58206036A JPS58206036A (ja) | 1983-12-01 |
| JPS6352427B2 true JPS6352427B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-10-19 |
Family
ID=13961374
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57089097A Granted JPS58206036A (ja) | 1982-05-26 | 1982-05-26 | 電子顕微鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58206036A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4704776B2 (ja) * | 2005-03-07 | 2011-06-22 | 富士通株式会社 | 結晶材料の格子歪みの評価方法及びその評価装置 |
-
1982
- 1982-05-26 JP JP57089097A patent/JPS58206036A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58206036A (ja) | 1983-12-01 |