JPH0210381B2 - - Google Patents
Info
- Publication number
- JPH0210381B2 JPH0210381B2 JP54123355A JP12335579A JPH0210381B2 JP H0210381 B2 JPH0210381 B2 JP H0210381B2 JP 54123355 A JP54123355 A JP 54123355A JP 12335579 A JP12335579 A JP 12335579A JP H0210381 B2 JPH0210381 B2 JP H0210381B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron beam
- electron
- image
- conductive film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 20
- 239000011521 glass Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 8
- 238000000879 optical micrograph Methods 0.000 claims description 3
- 239000000523 sample Substances 0.000 description 32
- 230000003287 optical effect Effects 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000012472 biological sample Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Investigating Or Analysing Biological Materials (AREA)
- Microscoopes, Condenser (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12335579A JPS5646463A (en) | 1979-09-26 | 1979-09-26 | Sample observing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12335579A JPS5646463A (en) | 1979-09-26 | 1979-09-26 | Sample observing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5646463A JPS5646463A (en) | 1981-04-27 |
| JPH0210381B2 true JPH0210381B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-03-07 |
Family
ID=14858518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12335579A Granted JPS5646463A (en) | 1979-09-26 | 1979-09-26 | Sample observing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5646463A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62209365A (ja) * | 1986-03-11 | 1987-09-14 | Tamotsu Inoue | 観察箱 |
| JP2008300354A (ja) * | 2007-05-31 | 2008-12-11 | Fei Co | 荷電粒子装置内での試料キャリアの使用、当該試料キャリアの使用方法、及び当該試料キャリアを用いるように備えられた装置 |
-
1979
- 1979-09-26 JP JP12335579A patent/JPS5646463A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5646463A (en) | 1981-04-27 |