JPH0343233Y2 - - Google Patents
Info
- Publication number
- JPH0343233Y2 JPH0343233Y2 JP1987150602U JP15060287U JPH0343233Y2 JP H0343233 Y2 JPH0343233 Y2 JP H0343233Y2 JP 1987150602 U JP1987150602 U JP 1987150602U JP 15060287 U JP15060287 U JP 15060287U JP H0343233 Y2 JPH0343233 Y2 JP H0343233Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- pallet
- annular holder
- holding mechanism
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 38
- 238000004544 sputter deposition Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 8
- 239000010409 thin film Substances 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987150602U JPH0343233Y2 (de) | 1987-09-30 | 1987-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987150602U JPH0343233Y2 (de) | 1987-09-30 | 1987-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6453754U JPS6453754U (de) | 1989-04-03 |
| JPH0343233Y2 true JPH0343233Y2 (de) | 1991-09-10 |
Family
ID=31423894
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987150602U Expired JPH0343233Y2 (de) | 1987-09-30 | 1987-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0343233Y2 (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2892723B2 (ja) * | 1989-12-20 | 1999-05-17 | 松下電器産業株式会社 | スパッタリング装置 |
| JPH0826455B2 (ja) * | 1990-06-20 | 1996-03-13 | 株式会社日立製作所 | スパツタリング装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56598U (de) * | 1979-06-16 | 1981-01-06 |
-
1987
- 1987-09-30 JP JP1987150602U patent/JPH0343233Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56598U (de) * | 1979-06-16 | 1981-01-06 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6453754U (de) | 1989-04-03 |
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