JPS6428371A - Substrate turning mechanism - Google Patents
Substrate turning mechanismInfo
- Publication number
- JPS6428371A JPS6428371A JP18355387A JP18355387A JPS6428371A JP S6428371 A JPS6428371 A JP S6428371A JP 18355387 A JP18355387 A JP 18355387A JP 18355387 A JP18355387 A JP 18355387A JP S6428371 A JPS6428371 A JP S6428371A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holders
- shaft
- turning mechanism
- guide members
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
PURPOSE:To considerably improve the thickness, compsn. distribution and step coverage of a film formed on each substrate by fitting a rotating and revolving mechanism to a device for treating a substrate by sputtering, vapor deposition or other method so as to enable the simultaneous rotation and revolution of plural substrates. CONSTITUTION:This substrate turning mechanism is composed essentially of a substrate support 14 having a revolving shaft 13 and turning on the shaft 13 as the center, guide members 19 arranged around the shaft 13 and substrate holders 17. Substrates 18 and fitted to the substrate holders 17 and the holders 17 connect to the guide members 19 and are guided by the members 19. Each of the holders 17 has a rotating shaft 17b supported by the support 14.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18355387A JPS6428371A (en) | 1987-07-24 | 1987-07-24 | Substrate turning mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18355387A JPS6428371A (en) | 1987-07-24 | 1987-07-24 | Substrate turning mechanism |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6428371A true JPS6428371A (en) | 1989-01-30 |
Family
ID=16137818
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18355387A Pending JPS6428371A (en) | 1987-07-24 | 1987-07-24 | Substrate turning mechanism |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6428371A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH031961U (en) * | 1989-05-31 | 1991-01-10 | ||
US4984531A (en) * | 1989-04-14 | 1991-01-15 | Leybold Aktiengesellschaft | Device for accepting and holding a workpiece in vacuum coating apparatus |
JPH04143274A (en) * | 1990-10-05 | 1992-05-18 | Shinku Kikai Kogyo Kk | Thin film forming device |
US5776256A (en) * | 1996-10-01 | 1998-07-07 | The United States Of America As Represented By The Secretary Of The Air Force | Coating chamber planetary gear mirror rotating system |
-
1987
- 1987-07-24 JP JP18355387A patent/JPS6428371A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4984531A (en) * | 1989-04-14 | 1991-01-15 | Leybold Aktiengesellschaft | Device for accepting and holding a workpiece in vacuum coating apparatus |
JPH031961U (en) * | 1989-05-31 | 1991-01-10 | ||
JPH04143274A (en) * | 1990-10-05 | 1992-05-18 | Shinku Kikai Kogyo Kk | Thin film forming device |
US5776256A (en) * | 1996-10-01 | 1998-07-07 | The United States Of America As Represented By The Secretary Of The Air Force | Coating chamber planetary gear mirror rotating system |
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