JPS6428371A - Substrate turning mechanism - Google Patents

Substrate turning mechanism

Info

Publication number
JPS6428371A
JPS6428371A JP18355387A JP18355387A JPS6428371A JP S6428371 A JPS6428371 A JP S6428371A JP 18355387 A JP18355387 A JP 18355387A JP 18355387 A JP18355387 A JP 18355387A JP S6428371 A JPS6428371 A JP S6428371A
Authority
JP
Japan
Prior art keywords
substrate
holders
shaft
turning mechanism
guide members
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18355387A
Other languages
Japanese (ja)
Inventor
Mutsumi Asano
Kiminori Maeno
Masanobu Kobayashi
Kayoko Oishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP18355387A priority Critical patent/JPS6428371A/en
Publication of JPS6428371A publication Critical patent/JPS6428371A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PURPOSE:To considerably improve the thickness, compsn. distribution and step coverage of a film formed on each substrate by fitting a rotating and revolving mechanism to a device for treating a substrate by sputtering, vapor deposition or other method so as to enable the simultaneous rotation and revolution of plural substrates. CONSTITUTION:This substrate turning mechanism is composed essentially of a substrate support 14 having a revolving shaft 13 and turning on the shaft 13 as the center, guide members 19 arranged around the shaft 13 and substrate holders 17. Substrates 18 and fitted to the substrate holders 17 and the holders 17 connect to the guide members 19 and are guided by the members 19. Each of the holders 17 has a rotating shaft 17b supported by the support 14.
JP18355387A 1987-07-24 1987-07-24 Substrate turning mechanism Pending JPS6428371A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18355387A JPS6428371A (en) 1987-07-24 1987-07-24 Substrate turning mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18355387A JPS6428371A (en) 1987-07-24 1987-07-24 Substrate turning mechanism

Publications (1)

Publication Number Publication Date
JPS6428371A true JPS6428371A (en) 1989-01-30

Family

ID=16137818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18355387A Pending JPS6428371A (en) 1987-07-24 1987-07-24 Substrate turning mechanism

Country Status (1)

Country Link
JP (1) JPS6428371A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH031961U (en) * 1989-05-31 1991-01-10
US4984531A (en) * 1989-04-14 1991-01-15 Leybold Aktiengesellschaft Device for accepting and holding a workpiece in vacuum coating apparatus
JPH04143274A (en) * 1990-10-05 1992-05-18 Shinku Kikai Kogyo Kk Thin film forming device
US5776256A (en) * 1996-10-01 1998-07-07 The United States Of America As Represented By The Secretary Of The Air Force Coating chamber planetary gear mirror rotating system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4984531A (en) * 1989-04-14 1991-01-15 Leybold Aktiengesellschaft Device for accepting and holding a workpiece in vacuum coating apparatus
JPH031961U (en) * 1989-05-31 1991-01-10
JPH04143274A (en) * 1990-10-05 1992-05-18 Shinku Kikai Kogyo Kk Thin film forming device
US5776256A (en) * 1996-10-01 1998-07-07 The United States Of America As Represented By The Secretary Of The Air Force Coating chamber planetary gear mirror rotating system

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