JPH0336861B2 - - Google Patents

Info

Publication number
JPH0336861B2
JPH0336861B2 JP57042779A JP4277982A JPH0336861B2 JP H0336861 B2 JPH0336861 B2 JP H0336861B2 JP 57042779 A JP57042779 A JP 57042779A JP 4277982 A JP4277982 A JP 4277982A JP H0336861 B2 JPH0336861 B2 JP H0336861B2
Authority
JP
Japan
Prior art keywords
formula
group
mol
polymer composition
general formula
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57042779A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57170929A (en
Inventor
Fumio Kataoka
Fusaji Shoji
Isao Obara
Kazunari Takemoto
Ataru Yokono
Tokio Isogai
Mitsumasa Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd, Hitachi Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP4277982A priority Critical patent/JPS57170929A/ja
Publication of JPS57170929A publication Critical patent/JPS57170929A/ja
Publication of JPH0336861B2 publication Critical patent/JPH0336861B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compositions Of Macromolecular Compounds (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
JP4277982A 1982-03-19 1982-03-19 Photosensitive polymeric composition Granted JPS57170929A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4277982A JPS57170929A (en) 1982-03-19 1982-03-19 Photosensitive polymeric composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4277982A JPS57170929A (en) 1982-03-19 1982-03-19 Photosensitive polymeric composition

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP56054408A Division JPS57168942A (en) 1981-04-13 1981-04-13 Photosensitive polymer composition

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP29534590A Division JPH03179057A (ja) 1990-11-02 1990-11-02 パターン形成法

Publications (2)

Publication Number Publication Date
JPS57170929A JPS57170929A (en) 1982-10-21
JPH0336861B2 true JPH0336861B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-06-03

Family

ID=12645450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4277982A Granted JPS57170929A (en) 1982-03-19 1982-03-19 Photosensitive polymeric composition

Country Status (1)

Country Link
JP (1) JPS57170929A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002055449A (ja) * 1993-09-03 2002-02-20 Hitachi Chem Co Ltd レリーフパターン、半導体用バッファコート膜及び多層配線板の層間絶縁膜の製造法
WO2005069075A1 (ja) 2004-01-14 2005-07-28 Hitachi Chemical Dupont Microsystems Ltd. 感光性重合体組成物、パターンの製造法及び電子部品
JP2005242389A (ja) * 1993-09-03 2005-09-08 Hitachi Chem Co Ltd 感光性樹脂組成物

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0798900B2 (ja) * 1986-05-14 1995-10-25 日立化成工業株式会社 感光性重合体組成物
JP2559720B2 (ja) * 1986-12-19 1996-12-04 株式会社日立製作所 感光性重合体組成物
JPH0827541B2 (ja) * 1988-12-01 1996-03-21 日立化成工業株式会社 感光性重合体組成物
JP2644599B2 (ja) * 1989-11-28 1997-08-25 株式会社日立製作所 半導体装置の製造方法
JP4811594B2 (ja) 2004-02-26 2011-11-09 日本電気株式会社 スチレン系誘導体、スチレン系重合体、感光性樹脂組成物、及びパターン形成方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5952822B2 (ja) * 1978-04-14 1984-12-21 東レ株式会社 耐熱性感光材料
JPS5624344A (en) * 1979-08-06 1981-03-07 Hitachi Ltd Photosensitive heat-resistant polymer composition
JPS57168942A (en) * 1981-04-13 1982-10-18 Hitachi Ltd Photosensitive polymer composition

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002055449A (ja) * 1993-09-03 2002-02-20 Hitachi Chem Co Ltd レリーフパターン、半導体用バッファコート膜及び多層配線板の層間絶縁膜の製造法
JP2005242389A (ja) * 1993-09-03 2005-09-08 Hitachi Chem Co Ltd 感光性樹脂組成物
WO2005069075A1 (ja) 2004-01-14 2005-07-28 Hitachi Chemical Dupont Microsystems Ltd. 感光性重合体組成物、パターンの製造法及び電子部品

Also Published As

Publication number Publication date
JPS57170929A (en) 1982-10-21

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