JPH0333062Y2 - - Google Patents
Info
- Publication number
- JPH0333062Y2 JPH0333062Y2 JP1986116095U JP11609586U JPH0333062Y2 JP H0333062 Y2 JPH0333062 Y2 JP H0333062Y2 JP 1986116095 U JP1986116095 U JP 1986116095U JP 11609586 U JP11609586 U JP 11609586U JP H0333062 Y2 JPH0333062 Y2 JP H0333062Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafers
- tray
- cassette
- inspected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 48
- 238000007689 inspection Methods 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Pile Receivers (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986116095U JPH0333062Y2 ( ) | 1986-07-28 | 1986-07-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986116095U JPH0333062Y2 ( ) | 1986-07-28 | 1986-07-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6322738U JPS6322738U ( ) | 1988-02-15 |
JPH0333062Y2 true JPH0333062Y2 ( ) | 1991-07-12 |
Family
ID=31000365
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986116095U Expired JPH0333062Y2 ( ) | 1986-07-28 | 1986-07-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0333062Y2 ( ) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63280434A (ja) * | 1987-05-12 | 1988-11-17 | Tokyo Electron Ltd | ウエハプロ−バ |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59175740A (ja) * | 1983-03-25 | 1984-10-04 | Telmec Co Ltd | ウエハ検出装置 |
-
1986
- 1986-07-28 JP JP1986116095U patent/JPH0333062Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59175740A (ja) * | 1983-03-25 | 1984-10-04 | Telmec Co Ltd | ウエハ検出装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6322738U ( ) | 1988-02-15 |
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