JPS6322738U - - Google Patents

Info

Publication number
JPS6322738U
JPS6322738U JP11609586U JP11609586U JPS6322738U JP S6322738 U JPS6322738 U JP S6322738U JP 11609586 U JP11609586 U JP 11609586U JP 11609586 U JP11609586 U JP 11609586U JP S6322738 U JPS6322738 U JP S6322738U
Authority
JP
Japan
Prior art keywords
wafers
feed
cassette
tray
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11609586U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0333062Y2 (
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986116095U priority Critical patent/JPH0333062Y2/ja
Publication of JPS6322738U publication Critical patent/JPS6322738U/ja
Application granted granted Critical
Publication of JPH0333062Y2 publication Critical patent/JPH0333062Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Pile Receivers (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1986116095U 1986-07-28 1986-07-28 Expired JPH0333062Y2 ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986116095U JPH0333062Y2 ( ) 1986-07-28 1986-07-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986116095U JPH0333062Y2 ( ) 1986-07-28 1986-07-28

Publications (2)

Publication Number Publication Date
JPS6322738U true JPS6322738U ( ) 1988-02-15
JPH0333062Y2 JPH0333062Y2 ( ) 1991-07-12

Family

ID=31000365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986116095U Expired JPH0333062Y2 ( ) 1986-07-28 1986-07-28

Country Status (1)

Country Link
JP (1) JPH0333062Y2 ( )

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63280434A (ja) * 1987-05-12 1988-11-17 Tokyo Electron Ltd ウエハプロ−バ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59175740A (ja) * 1983-03-25 1984-10-04 Telmec Co Ltd ウエハ検出装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59175740A (ja) * 1983-03-25 1984-10-04 Telmec Co Ltd ウエハ検出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63280434A (ja) * 1987-05-12 1988-11-17 Tokyo Electron Ltd ウエハプロ−バ

Also Published As

Publication number Publication date
JPH0333062Y2 ( ) 1991-07-12

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