JPS6447045U - - Google Patents
Info
- Publication number
- JPS6447045U JPS6447045U JP14193187U JP14193187U JPS6447045U JP S6447045 U JPS6447045 U JP S6447045U JP 14193187 U JP14193187 U JP 14193187U JP 14193187 U JP14193187 U JP 14193187U JP S6447045 U JPS6447045 U JP S6447045U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- storage device
- transport
- wafer storage
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 10
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14193187U JPS6447045U ( ) | 1987-09-17 | 1987-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14193187U JPS6447045U ( ) | 1987-09-17 | 1987-09-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6447045U true JPS6447045U ( ) | 1989-03-23 |
Family
ID=31407436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14193187U Pending JPS6447045U ( ) | 1987-09-17 | 1987-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6447045U ( ) |
-
1987
- 1987-09-17 JP JP14193187U patent/JPS6447045U/ja active Pending
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