JPS61196537U - - Google Patents
Info
- Publication number
- JPS61196537U JPS61196537U JP8192185U JP8192185U JPS61196537U JP S61196537 U JPS61196537 U JP S61196537U JP 8192185 U JP8192185 U JP 8192185U JP 8192185 U JP8192185 U JP 8192185U JP S61196537 U JPS61196537 U JP S61196537U
- Authority
- JP
- Japan
- Prior art keywords
- storage
- loading
- guide rail
- cassettes
- unloading station
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 5
- 230000002265 prevention Effects 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
- Intermediate Stations On Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8192185U JPS61196537U ( ) | 1985-05-29 | 1985-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8192185U JPS61196537U ( ) | 1985-05-29 | 1985-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61196537U true JPS61196537U ( ) | 1986-12-08 |
Family
ID=30629163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8192185U Pending JPS61196537U ( ) | 1985-05-29 | 1985-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61196537U ( ) |
-
1985
- 1985-05-29 JP JP8192185U patent/JPS61196537U/ja active Pending
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