JPH0329474B2 - - Google Patents

Info

Publication number
JPH0329474B2
JPH0329474B2 JP60090998A JP9099885A JPH0329474B2 JP H0329474 B2 JPH0329474 B2 JP H0329474B2 JP 60090998 A JP60090998 A JP 60090998A JP 9099885 A JP9099885 A JP 9099885A JP H0329474 B2 JPH0329474 B2 JP H0329474B2
Authority
JP
Japan
Prior art keywords
glass substrate
cleaned
cleaning
main surface
cleaning machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60090998A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61249582A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP60090998A priority Critical patent/JPS61249582A/ja
Publication of JPS61249582A publication Critical patent/JPS61249582A/ja
Publication of JPH0329474B2 publication Critical patent/JPH0329474B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP60090998A 1985-04-30 1985-04-30 洗浄装置 Granted JPS61249582A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60090998A JPS61249582A (ja) 1985-04-30 1985-04-30 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60090998A JPS61249582A (ja) 1985-04-30 1985-04-30 洗浄装置

Publications (2)

Publication Number Publication Date
JPS61249582A JPS61249582A (ja) 1986-11-06
JPH0329474B2 true JPH0329474B2 (en, 2012) 1991-04-24

Family

ID=14014164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60090998A Granted JPS61249582A (ja) 1985-04-30 1985-04-30 洗浄装置

Country Status (1)

Country Link
JP (1) JPS61249582A (en, 2012)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6428990U (en, 2012) * 1987-08-10 1989-02-21
US5345639A (en) * 1992-05-28 1994-09-13 Tokyo Electron Limited Device and method for scrubbing and cleaning substrate
JPH08188249A (ja) * 1995-01-05 1996-07-23 Murata Mach Ltd パレットへの物品の段積装置
JP2564661Y2 (ja) * 1995-01-11 1998-03-09 株式会社エンヤシステム 貼付板洗浄装置
JP5950759B2 (ja) * 2012-08-27 2016-07-13 Hoya株式会社 基板の製造方法及び基板洗浄装置
JP6492473B2 (ja) * 2014-09-12 2019-04-03 大日本印刷株式会社 カード洗浄装置およびカード作成システム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS583683A (ja) * 1981-06-30 1983-01-10 富士通株式会社 デイスク連続洗浄装置
JPS59153923U (ja) * 1983-03-30 1984-10-16 コニカ株式会社 板状体の搬送装置

Also Published As

Publication number Publication date
JPS61249582A (ja) 1986-11-06

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