JPH0329171B2 - - Google Patents

Info

Publication number
JPH0329171B2
JPH0329171B2 JP58044143A JP4414383A JPH0329171B2 JP H0329171 B2 JPH0329171 B2 JP H0329171B2 JP 58044143 A JP58044143 A JP 58044143A JP 4414383 A JP4414383 A JP 4414383A JP H0329171 B2 JPH0329171 B2 JP H0329171B2
Authority
JP
Japan
Prior art keywords
wafer
air
vacuum
shunter
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58044143A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59171123A (ja
Inventor
Yutaka Kakehi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58044143A priority Critical patent/JPS59171123A/ja
Publication of JPS59171123A publication Critical patent/JPS59171123A/ja
Publication of JPH0329171B2 publication Critical patent/JPH0329171B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices

Landscapes

  • Drying Of Semiconductors (AREA)
JP58044143A 1983-03-18 1983-03-18 真空処理装置 Granted JPS59171123A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58044143A JPS59171123A (ja) 1983-03-18 1983-03-18 真空処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58044143A JPS59171123A (ja) 1983-03-18 1983-03-18 真空処理装置

Publications (2)

Publication Number Publication Date
JPS59171123A JPS59171123A (ja) 1984-09-27
JPH0329171B2 true JPH0329171B2 (enExample) 1991-04-23

Family

ID=12683413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58044143A Granted JPS59171123A (ja) 1983-03-18 1983-03-18 真空処理装置

Country Status (1)

Country Link
JP (1) JPS59171123A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02295149A (ja) * 1989-05-10 1990-12-06 Fujitsu Ltd 基板搬送装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59119846A (ja) * 1982-12-27 1984-07-11 Fujitsu Ltd 真空処理装置

Also Published As

Publication number Publication date
JPS59171123A (ja) 1984-09-27

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