JPH0324066B2 - - Google Patents

Info

Publication number
JPH0324066B2
JPH0324066B2 JP56156664A JP15666481A JPH0324066B2 JP H0324066 B2 JPH0324066 B2 JP H0324066B2 JP 56156664 A JP56156664 A JP 56156664A JP 15666481 A JP15666481 A JP 15666481A JP H0324066 B2 JPH0324066 B2 JP H0324066B2
Authority
JP
Japan
Prior art keywords
oxide film
concentration
film
phosphorus
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56156664A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5857738A (ja
Inventor
Haruo Amano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP15666481A priority Critical patent/JPS5857738A/ja
Publication of JPS5857738A publication Critical patent/JPS5857738A/ja
Publication of JPH0324066B2 publication Critical patent/JPH0324066B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP15666481A 1981-10-01 1981-10-01 半導体装置の製造方法 Granted JPS5857738A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15666481A JPS5857738A (ja) 1981-10-01 1981-10-01 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15666481A JPS5857738A (ja) 1981-10-01 1981-10-01 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5857738A JPS5857738A (ja) 1983-04-06
JPH0324066B2 true JPH0324066B2 (enrdf_load_stackoverflow) 1991-04-02

Family

ID=15632598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15666481A Granted JPS5857738A (ja) 1981-10-01 1981-10-01 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5857738A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2606315B2 (ja) * 1988-09-08 1997-04-30 日本電気株式会社 半導体装置の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5157296A (en) * 1974-11-15 1976-05-19 Tokyo Shibaura Electric Co Handotaisoshino seizohoho
JPS5658247A (en) * 1979-10-17 1981-05-21 Fujitsu Ltd Production of semiconductor device

Also Published As

Publication number Publication date
JPS5857738A (ja) 1983-04-06

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