JPS6150385B2 - - Google Patents

Info

Publication number
JPS6150385B2
JPS6150385B2 JP55056774A JP5677480A JPS6150385B2 JP S6150385 B2 JPS6150385 B2 JP S6150385B2 JP 55056774 A JP55056774 A JP 55056774A JP 5677480 A JP5677480 A JP 5677480A JP S6150385 B2 JPS6150385 B2 JP S6150385B2
Authority
JP
Japan
Prior art keywords
insulating film
oxide film
semiconductor device
wiring layer
contact hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55056774A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56153751A (en
Inventor
Haruo Amano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP5677480A priority Critical patent/JPS56153751A/ja
Publication of JPS56153751A publication Critical patent/JPS56153751A/ja
Publication of JPS6150385B2 publication Critical patent/JPS6150385B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP5677480A 1980-04-28 1980-04-28 Semiconductor device Granted JPS56153751A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5677480A JPS56153751A (en) 1980-04-28 1980-04-28 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5677480A JPS56153751A (en) 1980-04-28 1980-04-28 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS56153751A JPS56153751A (en) 1981-11-27
JPS6150385B2 true JPS6150385B2 (enrdf_load_stackoverflow) 1986-11-04

Family

ID=13036801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5677480A Granted JPS56153751A (en) 1980-04-28 1980-04-28 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS56153751A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2694252B2 (ja) * 1987-06-18 1997-12-24 セイコーインスツルメンツ株式会社 半導体装置
US5780364A (en) * 1994-12-12 1998-07-14 Micron Technology, Inc. Method to cure mobile ion contamination in semiconductor processing

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5912013B2 (ja) * 1975-12-05 1984-03-19 日本電気株式会社 ハンドウタイシユウセキカイロ
JPS52113161A (en) * 1976-03-19 1977-09-22 Hitachi Ltd Semiconductor device

Also Published As

Publication number Publication date
JPS56153751A (en) 1981-11-27

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