JPH0322904Y2 - - Google Patents

Info

Publication number
JPH0322904Y2
JPH0322904Y2 JP1985136481U JP13648185U JPH0322904Y2 JP H0322904 Y2 JPH0322904 Y2 JP H0322904Y2 JP 1985136481 U JP1985136481 U JP 1985136481U JP 13648185 U JP13648185 U JP 13648185U JP H0322904 Y2 JPH0322904 Y2 JP H0322904Y2
Authority
JP
Japan
Prior art keywords
pattern
chip
pattern surface
reticle mask
patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985136481U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62104440U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985136481U priority Critical patent/JPH0322904Y2/ja
Publication of JPS62104440U publication Critical patent/JPS62104440U/ja
Application granted granted Critical
Publication of JPH0322904Y2 publication Critical patent/JPH0322904Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP1985136481U 1985-09-06 1985-09-06 Expired JPH0322904Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985136481U JPH0322904Y2 (cs) 1985-09-06 1985-09-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985136481U JPH0322904Y2 (cs) 1985-09-06 1985-09-06

Publications (2)

Publication Number Publication Date
JPS62104440U JPS62104440U (cs) 1987-07-03
JPH0322904Y2 true JPH0322904Y2 (cs) 1991-05-20

Family

ID=31039635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985136481U Expired JPH0322904Y2 (cs) 1985-09-06 1985-09-06

Country Status (1)

Country Link
JP (1) JPH0322904Y2 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2688816B2 (ja) * 1987-09-01 1997-12-10 三菱電機株式会社 マトリクス型表示装置の製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55132039A (en) * 1979-04-02 1980-10-14 Mitsubishi Electric Corp Forming method for repeated figure
JPS55140838A (en) * 1979-04-23 1980-11-04 Hitachi Ltd Mask preparing apparatus
JPS55165629A (en) * 1979-06-11 1980-12-24 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS58419U (ja) * 1981-06-25 1983-01-05 富士通株式会社 レチクル

Also Published As

Publication number Publication date
JPS62104440U (cs) 1987-07-03

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