JPH031172Y2 - - Google Patents
Info
- Publication number
- JPH031172Y2 JPH031172Y2 JP1985072697U JP7269785U JPH031172Y2 JP H031172 Y2 JPH031172 Y2 JP H031172Y2 JP 1985072697 U JP1985072697 U JP 1985072697U JP 7269785 U JP7269785 U JP 7269785U JP H031172 Y2 JPH031172 Y2 JP H031172Y2
- Authority
- JP
- Japan
- Prior art keywords
- dressing
- plate
- dressing plate
- suction table
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 7
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 239000011148 porous material Substances 0.000 description 11
- 235000012431 wafers Nutrition 0.000 description 9
- 239000002390 adhesive tape Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985072697U JPH031172Y2 (US06521211-20030218-C00004.png) | 1985-05-16 | 1985-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985072697U JPH031172Y2 (US06521211-20030218-C00004.png) | 1985-05-16 | 1985-05-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6239968U JPS6239968U (US06521211-20030218-C00004.png) | 1987-03-10 |
| JPH031172Y2 true JPH031172Y2 (US06521211-20030218-C00004.png) | 1991-01-16 |
Family
ID=30916378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985072697U Expired JPH031172Y2 (US06521211-20030218-C00004.png) | 1985-05-16 | 1985-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH031172Y2 (US06521211-20030218-C00004.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011183501A (ja) * | 2010-03-08 | 2011-09-22 | Disco Corp | 切削ブレードのドレッシング方法 |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007043263A1 (ja) * | 2005-10-14 | 2007-04-19 | Asahi Glass Company, Limited | 研磨パッド用ツルーイング部材及び研磨パッドのツルーイング方法 |
| JP5127270B2 (ja) * | 2007-03-09 | 2013-01-23 | 株式会社ディスコ | ドレッシング方法およびドレッサボード |
| JP5226394B2 (ja) * | 2008-06-16 | 2013-07-03 | 株式会社ディスコ | フランジの端面修正方法 |
| JP5384193B2 (ja) * | 2009-05-18 | 2014-01-08 | 株式会社ディスコ | 被加工物の保持ユニット |
| JP2013093383A (ja) * | 2011-10-24 | 2013-05-16 | Disco Abrasive Syst Ltd | 板状物の保持方法及び板状物の加工方法 |
| JP6376852B2 (ja) * | 2014-06-11 | 2018-08-22 | 株式会社ディスコ | ドレッシングボードの保持治具 |
| JP7002287B2 (ja) * | 2017-11-01 | 2022-01-20 | 株式会社ディスコ | ドレッシング用ウェーハ及びドレッシング方法 |
| JP7282466B2 (ja) * | 2019-07-18 | 2023-05-29 | 株式会社ディスコ | ドレッシング部材及びドレッシング方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4932071U (US06521211-20030218-C00004.png) * | 1972-06-29 | 1974-03-20 |
-
1985
- 1985-05-16 JP JP1985072697U patent/JPH031172Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011183501A (ja) * | 2010-03-08 | 2011-09-22 | Disco Corp | 切削ブレードのドレッシング方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6239968U (US06521211-20030218-C00004.png) | 1987-03-10 |
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