JPH0262947B2 - - Google Patents
Info
- Publication number
- JPH0262947B2 JPH0262947B2 JP59166709A JP16670984A JPH0262947B2 JP H0262947 B2 JPH0262947 B2 JP H0262947B2 JP 59166709 A JP59166709 A JP 59166709A JP 16670984 A JP16670984 A JP 16670984A JP H0262947 B2 JPH0262947 B2 JP H0262947B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- integrated circuit
- circuit element
- measuring
- test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012360 testing method Methods 0.000 claims description 20
- 239000000523 sample Substances 0.000 claims description 17
- 230000002159 abnormal effect Effects 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59166709A JPS6143441A (ja) | 1984-08-07 | 1984-08-07 | 半導体装置のテスト方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59166709A JPS6143441A (ja) | 1984-08-07 | 1984-08-07 | 半導体装置のテスト方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6143441A JPS6143441A (ja) | 1986-03-03 |
| JPH0262947B2 true JPH0262947B2 (enrdf_load_stackoverflow) | 1990-12-27 |
Family
ID=15836304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59166709A Granted JPS6143441A (ja) | 1984-08-07 | 1984-08-07 | 半導体装置のテスト方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6143441A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015141985A (ja) | 2014-01-28 | 2015-08-03 | 株式会社東芝 | 検査装置、及び検査方法 |
| JP6176201B2 (ja) | 2014-07-22 | 2017-08-09 | トヨタ自動車株式会社 | 半導体装置の製造方法 |
-
1984
- 1984-08-07 JP JP59166709A patent/JPS6143441A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6143441A (ja) | 1986-03-03 |
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