JPH0238440Y2 - - Google Patents
Info
- Publication number
- JPH0238440Y2 JPH0238440Y2 JP10162086U JP10162086U JPH0238440Y2 JP H0238440 Y2 JPH0238440 Y2 JP H0238440Y2 JP 10162086 U JP10162086 U JP 10162086U JP 10162086 U JP10162086 U JP 10162086U JP H0238440 Y2 JPH0238440 Y2 JP H0238440Y2
- Authority
- JP
- Japan
- Prior art keywords
- processing liquid
- sub
- substrate
- liquid
- drain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 74
- 238000012545 processing Methods 0.000 claims description 70
- 239000000758 substrate Substances 0.000 claims description 30
- 238000011084 recovery Methods 0.000 claims description 10
- 239000002699 waste material Substances 0.000 claims description 10
- 230000002265 prevention Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 238000004381 surface treatment Methods 0.000 description 5
- 238000011161 development Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000008213 purified water Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10162086U JPH0238440Y2 (enrdf_load_stackoverflow) | 1986-07-02 | 1986-07-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10162086U JPH0238440Y2 (enrdf_load_stackoverflow) | 1986-07-02 | 1986-07-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS639131U JPS639131U (enrdf_load_stackoverflow) | 1988-01-21 |
| JPH0238440Y2 true JPH0238440Y2 (enrdf_load_stackoverflow) | 1990-10-17 |
Family
ID=30972511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10162086U Expired JPH0238440Y2 (enrdf_load_stackoverflow) | 1986-07-02 | 1986-07-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238440Y2 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001319849A (ja) * | 2000-05-08 | 2001-11-16 | Tokyo Electron Ltd | 液処理装置及び液処理方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3359208B2 (ja) * | 1995-11-28 | 2002-12-24 | 大日本スクリーン製造株式会社 | 現像装置 |
-
1986
- 1986-07-02 JP JP10162086U patent/JPH0238440Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001319849A (ja) * | 2000-05-08 | 2001-11-16 | Tokyo Electron Ltd | 液処理装置及び液処理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS639131U (enrdf_load_stackoverflow) | 1988-01-21 |
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