JPS639131U - - Google Patents

Info

Publication number
JPS639131U
JPS639131U JP10162086U JP10162086U JPS639131U JP S639131 U JPS639131 U JP S639131U JP 10162086 U JP10162086 U JP 10162086U JP 10162086 U JP10162086 U JP 10162086U JP S639131 U JPS639131 U JP S639131U
Authority
JP
Japan
Prior art keywords
processing liquid
scattering
sub
shaped bottom
cup
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10162086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0238440Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10162086U priority Critical patent/JPH0238440Y2/ja
Publication of JPS639131U publication Critical patent/JPS639131U/ja
Application granted granted Critical
Publication of JPH0238440Y2 publication Critical patent/JPH0238440Y2/ja
Expired legal-status Critical Current

Links

JP10162086U 1986-07-02 1986-07-02 Expired JPH0238440Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10162086U JPH0238440Y2 (enrdf_load_stackoverflow) 1986-07-02 1986-07-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10162086U JPH0238440Y2 (enrdf_load_stackoverflow) 1986-07-02 1986-07-02

Publications (2)

Publication Number Publication Date
JPS639131U true JPS639131U (enrdf_load_stackoverflow) 1988-01-21
JPH0238440Y2 JPH0238440Y2 (enrdf_load_stackoverflow) 1990-10-17

Family

ID=30972511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10162086U Expired JPH0238440Y2 (enrdf_load_stackoverflow) 1986-07-02 1986-07-02

Country Status (1)

Country Link
JP (1) JPH0238440Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09152718A (ja) * 1995-11-28 1997-06-10 Dainippon Screen Mfg Co Ltd 現像装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001319849A (ja) * 2000-05-08 2001-11-16 Tokyo Electron Ltd 液処理装置及び液処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09152718A (ja) * 1995-11-28 1997-06-10 Dainippon Screen Mfg Co Ltd 現像装置

Also Published As

Publication number Publication date
JPH0238440Y2 (enrdf_load_stackoverflow) 1990-10-17

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