JPH02102726U - - Google Patents

Info

Publication number
JPH02102726U
JPH02102726U JP1056889U JP1056889U JPH02102726U JP H02102726 U JPH02102726 U JP H02102726U JP 1056889 U JP1056889 U JP 1056889U JP 1056889 U JP1056889 U JP 1056889U JP H02102726 U JPH02102726 U JP H02102726U
Authority
JP
Japan
Prior art keywords
etching
liquid
hole
etching liquid
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1056889U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0710494Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1056889U priority Critical patent/JPH0710494Y2/ja
Publication of JPH02102726U publication Critical patent/JPH02102726U/ja
Application granted granted Critical
Publication of JPH0710494Y2 publication Critical patent/JPH0710494Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP1056889U 1989-01-31 1989-01-31 基板エッチング装置 Expired - Lifetime JPH0710494Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1056889U JPH0710494Y2 (ja) 1989-01-31 1989-01-31 基板エッチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1056889U JPH0710494Y2 (ja) 1989-01-31 1989-01-31 基板エッチング装置

Publications (2)

Publication Number Publication Date
JPH02102726U true JPH02102726U (enrdf_load_stackoverflow) 1990-08-15
JPH0710494Y2 JPH0710494Y2 (ja) 1995-03-08

Family

ID=31218346

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1056889U Expired - Lifetime JPH0710494Y2 (ja) 1989-01-31 1989-01-31 基板エッチング装置

Country Status (1)

Country Link
JP (1) JPH0710494Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0710494Y2 (ja) 1995-03-08

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