JPH0236893B2 - - Google Patents

Info

Publication number
JPH0236893B2
JPH0236893B2 JP58009662A JP966283A JPH0236893B2 JP H0236893 B2 JPH0236893 B2 JP H0236893B2 JP 58009662 A JP58009662 A JP 58009662A JP 966283 A JP966283 A JP 966283A JP H0236893 B2 JPH0236893 B2 JP H0236893B2
Authority
JP
Japan
Prior art keywords
light
degrees
subject
photoelectric conversion
parallel light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58009662A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59135353A (ja
Inventor
Yukihiro Goto
Nobushi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP966283A priority Critical patent/JPS59135353A/ja
Priority to US06/534,119 priority patent/US4601577A/en
Publication of JPS59135353A publication Critical patent/JPS59135353A/ja
Publication of JPH0236893B2 publication Critical patent/JPH0236893B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP966283A 1982-09-21 1983-01-24 表面傷検出装置 Granted JPS59135353A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP966283A JPS59135353A (ja) 1983-01-24 1983-01-24 表面傷検出装置
US06/534,119 US4601577A (en) 1982-09-21 1983-09-20 Method and apparatus for detecting defects in a pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP966283A JPS59135353A (ja) 1983-01-24 1983-01-24 表面傷検出装置

Publications (2)

Publication Number Publication Date
JPS59135353A JPS59135353A (ja) 1984-08-03
JPH0236893B2 true JPH0236893B2 (zh) 1990-08-21

Family

ID=11726424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP966283A Granted JPS59135353A (ja) 1982-09-21 1983-01-24 表面傷検出装置

Country Status (1)

Country Link
JP (1) JPS59135353A (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004264025A (ja) * 2003-01-09 2004-09-24 Matsushita Electric Ind Co Ltd 画像認識装置および画像認識方法
JP2004264026A (ja) * 2003-01-09 2004-09-24 Matsushita Electric Ind Co Ltd 画像認識装置および画像認識方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0743322B2 (ja) * 1985-07-19 1995-05-15 株式会社日立製作所 検査方法および装置
JPH02223021A (ja) * 1988-11-18 1990-09-05 Csk Corp 光記録媒体の欠陥識別方法及びその装置
JP4973062B2 (ja) * 2006-08-14 2012-07-11 ヤマハ株式会社 半導体チップの検査方法及びウェハのクラック検査装置
KR20080015363A (ko) 2006-08-14 2008-02-19 야마하 가부시키가이샤 웨이퍼 및 반도체 소자의 검사 방법 및 장치
JP6436664B2 (ja) 2014-07-14 2018-12-12 住友化学株式会社 基板の検査装置及び基板の検査方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101389A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspecting method
JPS564046A (en) * 1979-06-26 1981-01-16 Nissan Motor Co Ltd Lamination type membrane-covered oxygen sensor
JPS5713340A (en) * 1980-06-27 1982-01-23 Hitachi Ltd Inspection apparatus for surface defect

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101389A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspecting method
JPS564046A (en) * 1979-06-26 1981-01-16 Nissan Motor Co Ltd Lamination type membrane-covered oxygen sensor
JPS5713340A (en) * 1980-06-27 1982-01-23 Hitachi Ltd Inspection apparatus for surface defect

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004264025A (ja) * 2003-01-09 2004-09-24 Matsushita Electric Ind Co Ltd 画像認識装置および画像認識方法
JP2004264026A (ja) * 2003-01-09 2004-09-24 Matsushita Electric Ind Co Ltd 画像認識装置および画像認識方法

Also Published As

Publication number Publication date
JPS59135353A (ja) 1984-08-03

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