JPH0234174B2 - - Google Patents
Info
- Publication number
- JPH0234174B2 JPH0234174B2 JP61009358A JP935886A JPH0234174B2 JP H0234174 B2 JPH0234174 B2 JP H0234174B2 JP 61009358 A JP61009358 A JP 61009358A JP 935886 A JP935886 A JP 935886A JP H0234174 B2 JPH0234174 B2 JP H0234174B2
- Authority
- JP
- Japan
- Prior art keywords
- push
- electronic component
- middle guide
- needle
- electronic components
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
- H10P72/7412—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support the auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support
- H10P72/7414—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support the auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support the auxiliary support including means facilitating the selective separation of some of a plurality of devices from the auxiliary support
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61009358A JPS62166536A (ja) | 1986-01-20 | 1986-01-20 | 電子部品の突き上げ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61009358A JPS62166536A (ja) | 1986-01-20 | 1986-01-20 | 電子部品の突き上げ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62166536A JPS62166536A (ja) | 1987-07-23 |
| JPH0234174B2 true JPH0234174B2 (enExample) | 1990-08-01 |
Family
ID=11718247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61009358A Granted JPS62166536A (ja) | 1986-01-20 | 1986-01-20 | 電子部品の突き上げ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62166536A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0376139A (ja) * | 1989-08-18 | 1991-04-02 | Nec Corp | 半導体素子突上げ方法 |
| JPH04137043U (ja) * | 1991-06-12 | 1992-12-21 | 山形日本電気株式会社 | 半導体ダイボンデイング装置のダイ突き上げ機構 |
| JPH0837395A (ja) * | 1994-07-21 | 1996-02-06 | Matsushita Electric Ind Co Ltd | 半導体チップ供給装置および供給方法 |
| JP3498877B2 (ja) * | 1995-12-05 | 2004-02-23 | 株式会社東芝 | 半導体製造装置および半導体装置の製造方法 |
| JP3441879B2 (ja) * | 1996-03-29 | 2003-09-02 | 日本碍子株式会社 | チップ剥離装置 |
| JP3976541B2 (ja) * | 2001-10-23 | 2007-09-19 | 富士通株式会社 | 半導体チップの剥離方法及び装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50136359U (enExample) * | 1974-04-27 | 1975-11-10 | ||
| JPS5410664A (en) * | 1977-06-24 | 1979-01-26 | Mitsubishi Electric Corp | Semiconductor pellet removing device |
-
1986
- 1986-01-20 JP JP61009358A patent/JPS62166536A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62166536A (ja) | 1987-07-23 |
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