JPS62166536A - 電子部品の突き上げ装置 - Google Patents
電子部品の突き上げ装置Info
- Publication number
- JPS62166536A JPS62166536A JP61009358A JP935886A JPS62166536A JP S62166536 A JPS62166536 A JP S62166536A JP 61009358 A JP61009358 A JP 61009358A JP 935886 A JP935886 A JP 935886A JP S62166536 A JPS62166536 A JP S62166536A
- Authority
- JP
- Japan
- Prior art keywords
- collet
- moved
- attracting
- component
- electronic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
- H10P72/7412—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support the auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support
- H10P72/7414—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support the auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support the auxiliary support including means facilitating the selective separation of some of a plurality of devices from the auxiliary support
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61009358A JPS62166536A (ja) | 1986-01-20 | 1986-01-20 | 電子部品の突き上げ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61009358A JPS62166536A (ja) | 1986-01-20 | 1986-01-20 | 電子部品の突き上げ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62166536A true JPS62166536A (ja) | 1987-07-23 |
| JPH0234174B2 JPH0234174B2 (enExample) | 1990-08-01 |
Family
ID=11718247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61009358A Granted JPS62166536A (ja) | 1986-01-20 | 1986-01-20 | 電子部品の突き上げ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62166536A (enExample) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0376139A (ja) * | 1989-08-18 | 1991-04-02 | Nec Corp | 半導体素子突上げ方法 |
| JPH04137043U (ja) * | 1991-06-12 | 1992-12-21 | 山形日本電気株式会社 | 半導体ダイボンデイング装置のダイ突き上げ機構 |
| US5589029A (en) * | 1994-07-21 | 1996-12-31 | Matsushita Electric Industrial Co., Ltd. | Semiconductor chip-supply method and apparatus |
| US6201306B1 (en) * | 1995-12-05 | 2001-03-13 | Kabushiki Kaisha Toshiba | Push-up pin of a semiconductor element pushing-up device, and a method for separating |
| US6464444B1 (en) * | 1996-03-29 | 2002-10-15 | Ngk Insulators, Ltd. | Apparatus for peeling off chips using a plurality of first and second protrusions |
| US6824643B2 (en) * | 2001-10-23 | 2004-11-30 | Fujitsu Limited | Method and device of peeling semiconductor device using annular contact members |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50136359U (enExample) * | 1974-04-27 | 1975-11-10 | ||
| JPS5410664A (en) * | 1977-06-24 | 1979-01-26 | Mitsubishi Electric Corp | Semiconductor pellet removing device |
-
1986
- 1986-01-20 JP JP61009358A patent/JPS62166536A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50136359U (enExample) * | 1974-04-27 | 1975-11-10 | ||
| JPS5410664A (en) * | 1977-06-24 | 1979-01-26 | Mitsubishi Electric Corp | Semiconductor pellet removing device |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0376139A (ja) * | 1989-08-18 | 1991-04-02 | Nec Corp | 半導体素子突上げ方法 |
| JPH04137043U (ja) * | 1991-06-12 | 1992-12-21 | 山形日本電気株式会社 | 半導体ダイボンデイング装置のダイ突き上げ機構 |
| US5589029A (en) * | 1994-07-21 | 1996-12-31 | Matsushita Electric Industrial Co., Ltd. | Semiconductor chip-supply method and apparatus |
| US6201306B1 (en) * | 1995-12-05 | 2001-03-13 | Kabushiki Kaisha Toshiba | Push-up pin of a semiconductor element pushing-up device, and a method for separating |
| US6555418B2 (en) | 1995-12-05 | 2003-04-29 | Kabushiki Kaisha Toshiba | Method for separating a semiconductor element in a semiconductor element pushing-up device |
| US6464444B1 (en) * | 1996-03-29 | 2002-10-15 | Ngk Insulators, Ltd. | Apparatus for peeling off chips using a plurality of first and second protrusions |
| US6824643B2 (en) * | 2001-10-23 | 2004-11-30 | Fujitsu Limited | Method and device of peeling semiconductor device using annular contact members |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0234174B2 (enExample) | 1990-08-01 |
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