JPH0230180B2 - - Google Patents

Info

Publication number
JPH0230180B2
JPH0230180B2 JP59032856A JP3285684A JPH0230180B2 JP H0230180 B2 JPH0230180 B2 JP H0230180B2 JP 59032856 A JP59032856 A JP 59032856A JP 3285684 A JP3285684 A JP 3285684A JP H0230180 B2 JPH0230180 B2 JP H0230180B2
Authority
JP
Japan
Prior art keywords
wiring
layer
upper layer
layer wirings
lower layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59032856A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60176251A (ja
Inventor
Tsutomu Akashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP3285684A priority Critical patent/JPS60176251A/ja
Publication of JPS60176251A publication Critical patent/JPS60176251A/ja
Publication of JPH0230180B2 publication Critical patent/JPH0230180B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP3285684A 1984-02-23 1984-02-23 半導体装置 Granted JPS60176251A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3285684A JPS60176251A (ja) 1984-02-23 1984-02-23 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3285684A JPS60176251A (ja) 1984-02-23 1984-02-23 半導体装置

Publications (2)

Publication Number Publication Date
JPS60176251A JPS60176251A (ja) 1985-09-10
JPH0230180B2 true JPH0230180B2 (enrdf_load_stackoverflow) 1990-07-04

Family

ID=12370479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3285684A Granted JPS60176251A (ja) 1984-02-23 1984-02-23 半導体装置

Country Status (1)

Country Link
JP (1) JPS60176251A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5462767A (en) * 1985-09-21 1995-10-31 Semiconductor Energy Laboratory Co., Ltd. CVD of conformal coatings over a depression using alkylmetal precursors
US5317185A (en) * 1990-11-06 1994-05-31 Motorola, Inc. Semiconductor device having structures to reduce stress notching effects in conductive lines and method for making the same
KR970004922B1 (ko) * 1993-07-27 1997-04-08 삼성전자 주식회사 고집적 반도체 배선구조 및 그 제조방법
JP2930025B2 (ja) * 1996-08-29 1999-08-03 日本電気株式会社 半導体装置及びその製造方法
JP2010034236A (ja) * 2008-07-28 2010-02-12 Panasonic Corp 固体撮像装置及びその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5791523A (en) * 1980-11-28 1982-06-07 Fujitsu Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS60176251A (ja) 1985-09-10

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