Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu LtdfiledCriticalFujitsu Ltd
Priority to JP57150406ApriorityCriticalpatent/JPS5940452A/ja
Publication of JPS5940452ApublicationCriticalpatent/JPS5940452A/ja
Publication of JPH0212379B2publicationCriticalpatent/JPH0212379B2/ja
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
H01J37/266—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy
H01J37/268—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy with scanning beams
Landscapes
Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Electron Sources, Ion Sources
(AREA)
Analysing Materials By The Use Of Radiation
(AREA)
Tests Of Electronic Circuits
(AREA)
Testing Or Measuring Of Semiconductors Or The Like
(AREA)