JPH0156682B2 - - Google Patents

Info

Publication number
JPH0156682B2
JPH0156682B2 JP57083998A JP8399882A JPH0156682B2 JP H0156682 B2 JPH0156682 B2 JP H0156682B2 JP 57083998 A JP57083998 A JP 57083998A JP 8399882 A JP8399882 A JP 8399882A JP H0156682 B2 JPH0156682 B2 JP H0156682B2
Authority
JP
Japan
Prior art keywords
light
light spot
dimensional shape
detection
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57083998A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58201006A (ja
Inventor
Kazuo Yamaguchi
Akio Oosaki
Nobuhiko Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8399882A priority Critical patent/JPS58201006A/ja
Publication of JPS58201006A publication Critical patent/JPS58201006A/ja
Publication of JPH0156682B2 publication Critical patent/JPH0156682B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP8399882A 1982-05-20 1982-05-20 立体形状検出装置 Granted JPS58201006A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8399882A JPS58201006A (ja) 1982-05-20 1982-05-20 立体形状検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8399882A JPS58201006A (ja) 1982-05-20 1982-05-20 立体形状検出装置

Publications (2)

Publication Number Publication Date
JPS58201006A JPS58201006A (ja) 1983-11-22
JPH0156682B2 true JPH0156682B2 (enrdf_load_stackoverflow) 1989-12-01

Family

ID=13818196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8399882A Granted JPS58201006A (ja) 1982-05-20 1982-05-20 立体形状検出装置

Country Status (1)

Country Link
JP (1) JPS58201006A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0612252B2 (ja) * 1984-03-21 1994-02-16 友彦 芥田 三次元形状の自動測定方法
JPS60209105A (ja) * 1984-04-02 1985-10-21 Sanpa Kogyo Kk 変位測定装置
US4650333A (en) * 1984-04-12 1987-03-17 International Business Machines Corporation System for measuring and detecting printed circuit wiring defects
JPS60220805A (ja) * 1984-04-17 1985-11-05 Kawasaki Heavy Ind Ltd 立体形状成形用型板製造装置
JPS6197505A (ja) * 1984-10-19 1986-05-16 Hitachi Ltd 実装電子装置のはんだ付部検査装置
JPH02156107A (ja) * 1988-12-08 1990-06-15 Kunio Yamashita プリント基板の半田付け部外観検査装置
JP2805909B2 (ja) * 1989-11-10 1998-09-30 松下電器産業株式会社 電子部品のリードの計測装置及び計測方法
JP2007033048A (ja) * 2005-07-22 2007-02-08 Ricoh Co Ltd はんだ接合判定方法，はんだ検査方法，はんだ検査装置およびはんだ検査用プログラムならびに記録媒体

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3746866A (en) * 1971-12-20 1973-07-17 Westinghouse Electric Corp Acousto-optical systems
JPS5230799A (en) * 1975-09-04 1977-03-08 Sumitomo Chem Co Ltd Method for production of porous carbon
JPS5636004A (en) * 1979-09-03 1981-04-09 Hitachi Ltd Detecting method of configuration and apparatus thereof

Also Published As

Publication number Publication date
JPS58201006A (ja) 1983-11-22

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