JPS58201006A - 立体形状検出装置 - Google Patents

立体形状検出装置

Info

Publication number
JPS58201006A
JPS58201006A JP8399882A JP8399882A JPS58201006A JP S58201006 A JPS58201006 A JP S58201006A JP 8399882 A JP8399882 A JP 8399882A JP 8399882 A JP8399882 A JP 8399882A JP S58201006 A JPS58201006 A JP S58201006A
Authority
JP
Japan
Prior art keywords
light
dimensional shape
detection
light spot
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8399882A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0156682B2 (enrdf_load_stackoverflow
Inventor
Kazuo Yamaguchi
和夫 山口
Akio Osaki
大崎　昭雄
Nobuhiko Aoki
信彦 青木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8399882A priority Critical patent/JPS58201006A/ja
Publication of JPS58201006A publication Critical patent/JPS58201006A/ja
Publication of JPH0156682B2 publication Critical patent/JPH0156682B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP8399882A 1982-05-20 1982-05-20 立体形状検出装置 Granted JPS58201006A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8399882A JPS58201006A (ja) 1982-05-20 1982-05-20 立体形状検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8399882A JPS58201006A (ja) 1982-05-20 1982-05-20 立体形状検出装置

Publications (2)

Publication Number Publication Date
JPS58201006A true JPS58201006A (ja) 1983-11-22
JPH0156682B2 JPH0156682B2 (enrdf_load_stackoverflow) 1989-12-01

Family

ID=13818196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8399882A Granted JPS58201006A (ja) 1982-05-20 1982-05-20 立体形状検出装置

Country Status (1)

Country Link
JP (1) JPS58201006A (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60196608A (ja) * 1984-03-21 1985-10-05 Tomohiko Akuta 三次元形状の自動測定方法
JPS60209105A (ja) * 1984-04-02 1985-10-21 Sanpa Kogyo Kk 変位測定装置
JPS60219504A (ja) * 1984-04-12 1985-11-02 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 基板上の回路素子の高さ測定装置
JPS60220805A (ja) * 1984-04-17 1985-11-05 Kawasaki Heavy Ind Ltd 立体形状成形用型板製造装置
JPS6197505A (ja) * 1984-10-19 1986-05-16 Hitachi Ltd 実装電子装置のはんだ付部検査装置
JPH02156107A (ja) * 1988-12-08 1990-06-15 Kunio Yamashita プリント基板の半田付け部外観検査装置
JPH03154802A (ja) * 1989-11-10 1991-07-02 Matsushita Electric Ind Co Ltd 電子部品のリードの計測装置及び計測方法
JP2007033048A (ja) * 2005-07-22 2007-02-08 Ricoh Co Ltd はんだ接合判定方法，はんだ検査方法，はんだ検査装置およびはんだ検査用プログラムならびに記録媒体

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4873161A (enrdf_load_stackoverflow) * 1971-12-20 1973-10-02
JPS5230799A (en) * 1975-09-04 1977-03-08 Sumitomo Chem Co Ltd Method for production of porous carbon
JPS5636004A (en) * 1979-09-03 1981-04-09 Hitachi Ltd Detecting method of configuration and apparatus thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4873161A (enrdf_load_stackoverflow) * 1971-12-20 1973-10-02
JPS5230799A (en) * 1975-09-04 1977-03-08 Sumitomo Chem Co Ltd Method for production of porous carbon
JPS5636004A (en) * 1979-09-03 1981-04-09 Hitachi Ltd Detecting method of configuration and apparatus thereof

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60196608A (ja) * 1984-03-21 1985-10-05 Tomohiko Akuta 三次元形状の自動測定方法
JPS60209105A (ja) * 1984-04-02 1985-10-21 Sanpa Kogyo Kk 変位測定装置
JPS60219504A (ja) * 1984-04-12 1985-11-02 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 基板上の回路素子の高さ測定装置
JPS60220805A (ja) * 1984-04-17 1985-11-05 Kawasaki Heavy Ind Ltd 立体形状成形用型板製造装置
JPS6197505A (ja) * 1984-10-19 1986-05-16 Hitachi Ltd 実装電子装置のはんだ付部検査装置
JPH02156107A (ja) * 1988-12-08 1990-06-15 Kunio Yamashita プリント基板の半田付け部外観検査装置
JPH03154802A (ja) * 1989-11-10 1991-07-02 Matsushita Electric Ind Co Ltd 電子部品のリードの計測装置及び計測方法
JP2007033048A (ja) * 2005-07-22 2007-02-08 Ricoh Co Ltd はんだ接合判定方法，はんだ検査方法，はんだ検査装置およびはんだ検査用プログラムならびに記録媒体

Also Published As

Publication number Publication date
JPH0156682B2 (enrdf_load_stackoverflow) 1989-12-01

Similar Documents

Publication Publication Date Title
EP0563829B1 (en) Device for inspecting printed cream solder
US6459493B1 (en) Apparatus for measuring surface form
JP3143038B2 (ja) 自動焦点合わせ方法及び装置並びに三次元形状検出方法及びその装置
JPH0355765B2 (enrdf_load_stackoverflow)
US5101442A (en) Three-dimensional imaging technique using sharp gradient of illumination
JPS5860593A (ja) 形状検出方法と装置
JPS58201006A (ja) 立体形状検出装置
JPH0719825A (ja) 基板検査装置
JP2001349710A (ja) 三次元計測装置
JP2987540B2 (ja) 三次元スキャナー
US20040263862A1 (en) Detecting peripheral points of reflected radiation beam spots for topographically mapping a surface
JPH04221705A (ja) 外観検査装置
JPS58171611A (ja) 形状検出装置
JP2511021B2 (ja) 実装部品検査装置
JPH02268207A (ja) 形状認識装置
JPS6355641B2 (enrdf_load_stackoverflow)
JP2596158B2 (ja) 部品認識装置
JPH04289409A (ja) 基板の検査方法
JP2839059B2 (ja) 三次元形状計測装置
JPS61205808A (ja) 形状検出装置
JP2002081924A (ja) 三次元計測装置
Kakinoki et al. Wide-Area, High Dynamic Range 3-D Imager
JPH0310110A (ja) 高さ測定方法及びその装置
WO2003087711A1 (fr) Procede de mesure haute precision d'un objet au moyen d'un faisceau de reflexion laser et dispositif correspondant
JPS6378008A (ja) パタ−ン検査装置