JPS5636004A - Detecting method of configuration and apparatus thereof - Google Patents
Detecting method of configuration and apparatus thereofInfo
- Publication number
- JPS5636004A JPS5636004A JP11170679A JP11170679A JPS5636004A JP S5636004 A JPS5636004 A JP S5636004A JP 11170679 A JP11170679 A JP 11170679A JP 11170679 A JP11170679 A JP 11170679A JP S5636004 A JPS5636004 A JP S5636004A
- Authority
- JP
- Japan
- Prior art keywords
- detectors
- dead angle
- image
- subject
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To accomplish detection of surface configuration without dead angle by detecting a linear light projected on the subject to be measured with two image detectors provided slantly thereabove.
CONSTITUTION: A slit light projector 2 is provided above the subject to be measured and the image detectors 3 and 3A are provided on each side thereof. Image without dead angle can be obtained utilizing the detectors 3 and 3A. In other words, when the dead angle occures in one of the detectors, information of the other detector is utilized to achieve the purpose.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11170679A JPS5636004A (en) | 1979-09-03 | 1979-09-03 | Detecting method of configuration and apparatus thereof |
US06/181,768 US4343553A (en) | 1979-09-03 | 1980-08-27 | Shape testing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11170679A JPS5636004A (en) | 1979-09-03 | 1979-09-03 | Detecting method of configuration and apparatus thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5636004A true JPS5636004A (en) | 1981-04-09 |
JPS6153643B2 JPS6153643B2 (en) | 1986-11-19 |
Family
ID=14568081
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11170679A Granted JPS5636004A (en) | 1979-09-03 | 1979-09-03 | Detecting method of configuration and apparatus thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5636004A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57207852A (en) * | 1981-05-15 | 1982-12-20 | Siemens Ag | Method of detecting three-dimensional object |
JPS58201006A (en) * | 1982-05-20 | 1983-11-22 | Hitachi Ltd | Detector of three-dimensional shape |
JPH01240260A (en) * | 1988-03-22 | 1989-09-25 | Okuma Mach Works Ltd | Non-contact type digitizer |
US5208463A (en) * | 1990-08-24 | 1993-05-04 | Hitachi, Ltd. | Method and apparatus for detecting deformations of leads of semiconductor device |
US5347363A (en) * | 1991-07-25 | 1994-09-13 | Kabushiki Kaisha Toshiba | External lead shape measurement apparatus for measuring lead shape of semiconductor package by using stereoscopic vision |
WO2013046998A1 (en) * | 2011-09-29 | 2013-04-04 | 株式会社 日立ハイテクノロジーズ | Device for measuring shape formed on substrate |
-
1979
- 1979-09-03 JP JP11170679A patent/JPS5636004A/en active Granted
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57207852A (en) * | 1981-05-15 | 1982-12-20 | Siemens Ag | Method of detecting three-dimensional object |
JPS58201006A (en) * | 1982-05-20 | 1983-11-22 | Hitachi Ltd | Detector of three-dimensional shape |
JPH0156682B2 (en) * | 1982-05-20 | 1989-12-01 | Hitachi Ltd | |
JPH01240260A (en) * | 1988-03-22 | 1989-09-25 | Okuma Mach Works Ltd | Non-contact type digitizer |
JP2577950B2 (en) * | 1988-03-22 | 1997-02-05 | オークマ 株式会社 | Non-contact digitizer |
US5208463A (en) * | 1990-08-24 | 1993-05-04 | Hitachi, Ltd. | Method and apparatus for detecting deformations of leads of semiconductor device |
US5347363A (en) * | 1991-07-25 | 1994-09-13 | Kabushiki Kaisha Toshiba | External lead shape measurement apparatus for measuring lead shape of semiconductor package by using stereoscopic vision |
WO2013046998A1 (en) * | 2011-09-29 | 2013-04-04 | 株式会社 日立ハイテクノロジーズ | Device for measuring shape formed on substrate |
Also Published As
Publication number | Publication date |
---|---|
JPS6153643B2 (en) | 1986-11-19 |
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