JPH0153451B2 - - Google Patents
Info
- Publication number
- JPH0153451B2 JPH0153451B2 JP57004327A JP432782A JPH0153451B2 JP H0153451 B2 JPH0153451 B2 JP H0153451B2 JP 57004327 A JP57004327 A JP 57004327A JP 432782 A JP432782 A JP 432782A JP H0153451 B2 JPH0153451 B2 JP H0153451B2
- Authority
- JP
- Japan
- Prior art keywords
- component
- weight
- photosensitive material
- photosensitive
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/016—Diazonium salts or compounds
- G03F7/021—Macromolecular diazonium compounds; Macromolecular additives, e.g. binders
- G03F7/0212—Macromolecular diazonium compounds; Macromolecular additives, e.g. binders characterised by the polymeric binder or the macromolecular additives other than the diazo resins or the polymeric diazonium compounds
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Materials For Photolithography (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57004327A JPS58122533A (ja) | 1982-01-14 | 1982-01-14 | 感光性材料 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57004327A JPS58122533A (ja) | 1982-01-14 | 1982-01-14 | 感光性材料 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58122533A JPS58122533A (ja) | 1983-07-21 |
| JPH0153451B2 true JPH0153451B2 (cg-RX-API-DMAC7.html) | 1989-11-14 |
Family
ID=11581350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57004327A Granted JPS58122533A (ja) | 1982-01-14 | 1982-01-14 | 感光性材料 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58122533A (cg-RX-API-DMAC7.html) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63303343A (ja) * | 1987-06-03 | 1988-12-09 | Konica Corp | 感光性組成物及び感光性平版印刷版 |
| DE3817009A1 (de) * | 1988-05-19 | 1989-11-30 | Basf Ag | Strahlungsempfindliches gemisch und verfahren zur herstellung von reliefmustern |
| JP2849623B2 (ja) * | 1989-08-15 | 1999-01-20 | コニカ株式会社 | 画像形成方法 |
| JPH03223858A (ja) * | 1990-01-30 | 1991-10-02 | Matsushita Electric Ind Co Ltd | パターン形成方法 |
| JPH04158363A (ja) * | 1990-10-22 | 1992-06-01 | Mitsubishi Electric Corp | パターン形成用レジスト材料 |
| US5372912A (en) * | 1992-12-31 | 1994-12-13 | International Business Machines Corporation | Radiation-sensitive resist composition and process for its use |
| US6004720A (en) | 1993-12-28 | 1999-12-21 | Fujitsu Limited | Radiation sensitive material and method for forming pattern |
| JP4615673B2 (ja) * | 2000-05-16 | 2011-01-19 | コダック株式会社 | ポジ型感光性組成物及びポジ型感光性平版印刷版 |
| TW554250B (en) * | 2000-12-14 | 2003-09-21 | Clariant Int Ltd | Resist with high resolution to i ray and process for forming pattern |
| JP2008191218A (ja) * | 2007-02-01 | 2008-08-21 | Tokyo Ohka Kogyo Co Ltd | 厚膜用化学増幅型ポジ型ホトレジスト組成物及び厚膜レジストパターンの製造方法 |
| WO2022255171A1 (ja) * | 2021-06-02 | 2022-12-08 | 昭和電工株式会社 | ポジ型感光性樹脂組成物、及び有機el素子隔壁 |
-
1982
- 1982-01-14 JP JP57004327A patent/JPS58122533A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58122533A (ja) | 1983-07-21 |