JPH0129054B2 - - Google Patents

Info

Publication number
JPH0129054B2
JPH0129054B2 JP58088388A JP8838883A JPH0129054B2 JP H0129054 B2 JPH0129054 B2 JP H0129054B2 JP 58088388 A JP58088388 A JP 58088388A JP 8838883 A JP8838883 A JP 8838883A JP H0129054 B2 JPH0129054 B2 JP H0129054B2
Authority
JP
Japan
Prior art keywords
cleaning
substrate
carrier
chamber
steam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58088388A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59215729A (ja
Inventor
Hirosane Takei
Akira Sudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP58088388A priority Critical patent/JPS59215729A/ja
Publication of JPS59215729A publication Critical patent/JPS59215729A/ja
Publication of JPH0129054B2 publication Critical patent/JPH0129054B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P52/00—

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP58088388A 1983-05-21 1983-05-21 半導体もしくは磁気記録媒体等の基板の洗浄装置 Granted JPS59215729A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58088388A JPS59215729A (ja) 1983-05-21 1983-05-21 半導体もしくは磁気記録媒体等の基板の洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58088388A JPS59215729A (ja) 1983-05-21 1983-05-21 半導体もしくは磁気記録媒体等の基板の洗浄装置

Publications (2)

Publication Number Publication Date
JPS59215729A JPS59215729A (ja) 1984-12-05
JPH0129054B2 true JPH0129054B2 (OSRAM) 1989-06-07

Family

ID=13941405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58088388A Granted JPS59215729A (ja) 1983-05-21 1983-05-21 半導体もしくは磁気記録媒体等の基板の洗浄装置

Country Status (1)

Country Link
JP (1) JPS59215729A (OSRAM)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0695382B2 (ja) * 1987-10-17 1994-11-24 東京エレクトロン株式会社 ディスクの洗浄方法
JPH0749790Y2 (ja) * 1989-02-02 1995-11-13 山形日本電気株式会社 半導体ウェーハの洗浄装置
KR910007593A (ko) * 1989-10-17 1991-05-30 제임스 조셉 드롱 강제 유체대류에 의한 오염 입자 제거장치 및 방법
JPH0757913B2 (ja) * 1989-10-27 1995-06-21 オリエンタルエンヂニアリング株式会社 脱脂洗浄方法および装置
DE19522525A1 (de) * 1994-10-04 1996-04-11 Kunze Concewitz Horst Dipl Phy Verfahren und Vorrichtung zum Feinstreinigen von Oberflächen
JP5104174B2 (ja) 2007-10-01 2012-12-19 富士通株式会社 洗浄乾燥装置及び洗浄乾燥方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2424482A1 (de) * 1973-05-21 1974-12-12 Allied Chem Auf eine foerdereinrichtung synchronisierte bewegliche spruehkoepfe
JPS5536182B2 (OSRAM) * 1973-10-15 1980-09-19
JPS5544780A (en) * 1978-09-27 1980-03-29 Toshiba Corp Cleaning device for semiconductor wafer
JPS5846170B2 (ja) * 1979-09-20 1983-10-14 株式会社東芝 半導体ウェファ−の搬送方法および搬送装置
JPS56125842A (en) * 1980-03-06 1981-10-02 Nec Corp Injection-type cleaning device
JPS5756930A (en) * 1980-09-22 1982-04-05 Mitsubishi Electric Corp Wafer washing and drying device
JPS57154836A (en) * 1981-03-20 1982-09-24 Hitachi Ltd Washing method for semiconductor wafer, mask, etc.

Also Published As

Publication number Publication date
JPS59215729A (ja) 1984-12-05

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