JPH01152774A - ジョセフソン接合素子の形成方法 - Google Patents

ジョセフソン接合素子の形成方法

Info

Publication number
JPH01152774A
JPH01152774A JP62311094A JP31109487A JPH01152774A JP H01152774 A JPH01152774 A JP H01152774A JP 62311094 A JP62311094 A JP 62311094A JP 31109487 A JP31109487 A JP 31109487A JP H01152774 A JPH01152774 A JP H01152774A
Authority
JP
Japan
Prior art keywords
film
substrate
lower electrode
sputtering
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62311094A
Other languages
English (en)
Japanese (ja)
Other versions
JPH055386B2 (enrdf_load_stackoverflow
Inventor
Koji Yamada
宏治 山田
Hiroyuki Mori
博之 森
Yoshinobu Taruya
良信 樽谷
Mikio Hirano
幹夫 平野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP62311094A priority Critical patent/JPH01152774A/ja
Publication of JPH01152774A publication Critical patent/JPH01152774A/ja
Publication of JPH055386B2 publication Critical patent/JPH055386B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP62311094A 1987-12-10 1987-12-10 ジョセフソン接合素子の形成方法 Granted JPH01152774A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62311094A JPH01152774A (ja) 1987-12-10 1987-12-10 ジョセフソン接合素子の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62311094A JPH01152774A (ja) 1987-12-10 1987-12-10 ジョセフソン接合素子の形成方法

Publications (2)

Publication Number Publication Date
JPH01152774A true JPH01152774A (ja) 1989-06-15
JPH055386B2 JPH055386B2 (enrdf_load_stackoverflow) 1993-01-22

Family

ID=18013060

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62311094A Granted JPH01152774A (ja) 1987-12-10 1987-12-10 ジョセフソン接合素子の形成方法

Country Status (1)

Country Link
JP (1) JPH01152774A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023052344A (ja) * 2012-03-08 2023-04-11 ディー－ウェイブ システムズ インコーポレイテッド 超伝導集積回路の製作のためのシステムおよび方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023052344A (ja) * 2012-03-08 2023-04-11 ディー－ウェイブ システムズ インコーポレイテッド 超伝導集積回路の製作のためのシステムおよび方法

Also Published As

Publication number Publication date
JPH055386B2 (enrdf_load_stackoverflow) 1993-01-22

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term