JP7759200B2 - 駆動装置の制御方法、駆動装置、リソグラフィ装置、および物品の製造方法 - Google Patents

駆動装置の制御方法、駆動装置、リソグラフィ装置、および物品の製造方法

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Publication number
JP7759200B2
JP7759200B2 JP2021113134A JP2021113134A JP7759200B2 JP 7759200 B2 JP7759200 B2 JP 7759200B2 JP 2021113134 A JP2021113134 A JP 2021113134A JP 2021113134 A JP2021113134 A JP 2021113134A JP 7759200 B2 JP7759200 B2 JP 7759200B2
Authority
JP
Japan
Prior art keywords
stator
driving
mover
linear motor
coils
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021113134A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023009675A5 (https=
JP2023009675A (ja
Inventor
勇人 星野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2021113134A priority Critical patent/JP7759200B2/ja
Priority to TW111123662A priority patent/TWI922702B/zh
Priority to EP22181193.8A priority patent/EP4116773A1/en
Priority to KR1020220078578A priority patent/KR102905060B1/ko
Priority to US17/856,018 priority patent/US11754932B2/en
Priority to CN202210802453.0A priority patent/CN115598930A/zh
Publication of JP2023009675A publication Critical patent/JP2023009675A/ja
Priority to US18/228,031 priority patent/US12130560B2/en
Publication of JP2023009675A5 publication Critical patent/JP2023009675A5/ja
Priority to US18/896,980 priority patent/US20250021023A1/en
Application granted granted Critical
Publication of JP7759200B2 publication Critical patent/JP7759200B2/ja
Priority to KR1020250207421A priority patent/KR20260006527A/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G03F7/70725—Stages control
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06—Linear motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06—Linear motors
    • H02P25/064—Linear motors of the synchronous type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/16—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the circuit arrangement or by the kind of wiring
    • H02P25/22—Multiple windings; Windings for more than three phases

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Control Of Linear Motors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2021113134A 2021-07-07 2021-07-07 駆動装置の制御方法、駆動装置、リソグラフィ装置、および物品の製造方法 Active JP7759200B2 (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP2021113134A JP7759200B2 (ja) 2021-07-07 2021-07-07 駆動装置の制御方法、駆動装置、リソグラフィ装置、および物品の製造方法
TW111123662A TWI922702B (zh) 2021-07-07 2022-06-24 驅動裝置及其控制方法、光刻裝置和物品製造方法
EP22181193.8A EP4116773A1 (en) 2021-07-07 2022-06-27 Control method of driving apparatus, driving apparatus, lithography apparatus, and method of manufacturing article
KR1020220078578A KR102905060B1 (ko) 2021-07-07 2022-06-28 구동장치의 제어 방법, 구동장치, 리소그래피 장치, 및 물품의 제조 방법
US17/856,018 US11754932B2 (en) 2021-07-07 2022-07-01 Control method of driving apparatus, driving apparatus, lithography apparatus, and method of manufacturing article
CN202210802453.0A CN115598930A (zh) 2021-07-07 2022-07-07 驱动装置及其控制方法、光刻装置和物品制造方法
US18/228,031 US12130560B2 (en) 2021-07-07 2023-07-31 Control method of driving apparatus, driving apparatus, lithography apparatus, and method of manufacturing article
US18/896,980 US20250021023A1 (en) 2021-07-07 2024-09-26 Control method of driving apparatus, driving apparatus, lithography apparatus, and method of manufacturing article
KR1020250207421A KR20260006527A (ko) 2021-07-07 2025-12-23 구동장치, 구동장치의 제어 방법, 리소그래피 장치, 및 물품의 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021113134A JP7759200B2 (ja) 2021-07-07 2021-07-07 駆動装置の制御方法、駆動装置、リソグラフィ装置、および物品の製造方法

Publications (3)

Publication Number Publication Date
JP2023009675A JP2023009675A (ja) 2023-01-20
JP2023009675A5 JP2023009675A5 (https=) 2024-07-12
JP7759200B2 true JP7759200B2 (ja) 2025-10-23

Family

ID=82321546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021113134A Active JP7759200B2 (ja) 2021-07-07 2021-07-07 駆動装置の制御方法、駆動装置、リソグラフィ装置、および物品の製造方法

Country Status (5)

Country Link
US (3) US11754932B2 (https=)
EP (1) EP4116773A1 (https=)
JP (1) JP7759200B2 (https=)
KR (2) KR102905060B1 (https=)
CN (1) CN115598930A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7759200B2 (ja) * 2021-07-07 2025-10-23 キヤノン株式会社 駆動装置の制御方法、駆動装置、リソグラフィ装置、および物品の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001349137A (ja) 2000-06-09 2001-12-21 Matsushita Electric Works Ltd 扉開閉装置
JP2006067761A (ja) 2004-08-30 2006-03-09 Canon Inc 駆動装置
JP2008118729A (ja) 2006-10-31 2008-05-22 Nsk Ltd 電動パワーステアリング装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04308450A (ja) * 1991-04-03 1992-10-30 Ricoh Co Ltd リニア直流モータ
JP3613291B2 (ja) * 1995-03-08 2005-01-26 株式会社ニコン 露光装置
JP3501559B2 (ja) 1995-06-27 2004-03-02 キヤノン株式会社 リニア・モータ装置
US6590355B1 (en) * 1999-06-07 2003-07-08 Nikon Corporation Linear motor device, stage device, and exposure apparatus
CA2343830C (en) * 2000-05-12 2005-02-08 Seiko Epson Corporation Drive mechanism control device and method
JP4094799B2 (ja) * 2000-06-22 2008-06-04 日本トムソン株式会社 可動マグネット型リニアモータを内蔵したスライド装置
JP4474020B2 (ja) * 2000-06-23 2010-06-02 キヤノン株式会社 移動装置及び露光装置
JP2012108608A (ja) * 2010-11-15 2012-06-07 Smc Corp アクチュエータ用駆動制御装置及びアクチュエータの駆動制御方法
CN107466444B (zh) * 2015-02-08 2019-05-17 超级高铁技术公司 动态直线定子段控制
JP6653179B2 (ja) * 2016-01-14 2020-02-26 Thk株式会社 リニアモータの制御装置及び制御方法
US10734912B2 (en) * 2016-08-24 2020-08-04 Beckhoff Automation Gmbh Stator device for a linear motor, linear drive system, and method for operating a stator device
JP7025256B2 (ja) * 2018-03-16 2022-02-24 キヤノン株式会社 ステージ装置、リソグラフィ装置、および物品の製造方法
JP2021089963A (ja) * 2019-12-04 2021-06-10 キヤノン株式会社 搬送装置、露光装置及び物品の製造方法
JP7759200B2 (ja) * 2021-07-07 2025-10-23 キヤノン株式会社 駆動装置の制御方法、駆動装置、リソグラフィ装置、および物品の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001349137A (ja) 2000-06-09 2001-12-21 Matsushita Electric Works Ltd 扉開閉装置
JP2006067761A (ja) 2004-08-30 2006-03-09 Canon Inc 駆動装置
JP2008118729A (ja) 2006-10-31 2008-05-22 Nsk Ltd 電動パワーステアリング装置

Also Published As

Publication number Publication date
EP4116773A1 (en) 2023-01-11
US20250021023A1 (en) 2025-01-16
US11754932B2 (en) 2023-09-12
KR20230008607A (ko) 2023-01-16
TW202304123A (zh) 2023-01-16
US12130560B2 (en) 2024-10-29
CN115598930A (zh) 2023-01-13
KR20260006527A (ko) 2026-01-13
KR102905060B1 (ko) 2025-12-29
US20230375946A1 (en) 2023-11-23
US20230011753A1 (en) 2023-01-12
JP2023009675A (ja) 2023-01-20

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