JP7617290B2 - 銅板付きの窒化ケイ素セラミック基板の作製方法 - Google Patents

銅板付きの窒化ケイ素セラミック基板の作製方法 Download PDF

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JP7617290B2
JP7617290B2 JP2023543222A JP2023543222A JP7617290B2 JP 7617290 B2 JP7617290 B2 JP 7617290B2 JP 2023543222 A JP2023543222 A JP 2023543222A JP 2023543222 A JP2023543222 A JP 2023543222A JP 7617290 B2 JP7617290 B2 JP 7617290B2
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silicon nitride
ceramic substrate
nitride ceramic
copper plate
atmosphere
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JP2024506483A5 (https=
JP2024506483A (ja
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学建 劉
輝 張
秀敏 姚
岩 劉
金弟 蒋
政仁 黄
忠明 陳
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Shanghai Institute of Ceramics of CAS
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Shanghai Institute of Ceramics of CAS
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