CN112811922B - 一种覆铜板的氮化硅陶瓷基片及其制备方法 - Google Patents

一种覆铜板的氮化硅陶瓷基片及其制备方法 Download PDF

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CN112811922B
CN112811922B CN202110075100.0A CN202110075100A CN112811922B CN 112811922 B CN112811922 B CN 112811922B CN 202110075100 A CN202110075100 A CN 202110075100A CN 112811922 B CN112811922 B CN 112811922B
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silicon nitride
ceramic substrate
nitride ceramic
atmosphere
powder
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CN112811922A (zh
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刘学建
张辉
姚秀敏
刘岩
蒋金弟
黄政仁
陈忠明
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Shanghai Institute of Ceramics of CAS
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Shanghai Institute of Ceramics of CAS
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Priority to US18/261,078 priority patent/US12351524B2/en
Priority to EP22742113.8A priority patent/EP4282848A4/en
Priority to JP2023543222A priority patent/JP7617290B2/ja
Priority to PCT/CN2022/072347 priority patent/WO2022156634A1/zh
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