JP7481821B2 - 光学デバイス - Google Patents
光学デバイス Download PDFInfo
- Publication number
- JP7481821B2 JP7481821B2 JP2019178842A JP2019178842A JP7481821B2 JP 7481821 B2 JP7481821 B2 JP 7481821B2 JP 2019178842 A JP2019178842 A JP 2019178842A JP 2019178842 A JP2019178842 A JP 2019178842A JP 7481821 B2 JP7481821 B2 JP 7481821B2
- Authority
- JP
- Japan
- Prior art keywords
- heating
- unit
- movable
- movable part
- optical device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
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- 238000009792 diffusion process Methods 0.000 description 4
- 238000005485 electric heating Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
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- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
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- 229910003460 diamond Inorganic materials 0.000 description 2
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
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- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
- G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019178842A JP7481821B2 (ja) | 2019-09-30 | 2019-09-30 | 光学デバイス |
| CN202080068254.0A CN114450618B (zh) | 2019-09-30 | 2020-09-09 | 光学装置 |
| DE112020004669.9T DE112020004669T5 (de) | 2019-09-30 | 2020-09-09 | Optikvorrichtung |
| PCT/JP2020/034183 WO2021065399A1 (ja) | 2019-09-30 | 2020-09-09 | 光学デバイス |
| US17/763,285 US20220342206A1 (en) | 2019-09-30 | 2020-09-09 | Optical device |
| TW109132879A TWI867052B (zh) | 2019-09-30 | 2020-09-23 | 光學裝置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019178842A JP7481821B2 (ja) | 2019-09-30 | 2019-09-30 | 光学デバイス |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021056368A JP2021056368A (ja) | 2021-04-08 |
| JP2021056368A5 JP2021056368A5 (enExample) | 2022-10-05 |
| JP7481821B2 true JP7481821B2 (ja) | 2024-05-13 |
Family
ID=75270662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019178842A Active JP7481821B2 (ja) | 2019-09-30 | 2019-09-30 | 光学デバイス |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20220342206A1 (enExample) |
| JP (1) | JP7481821B2 (enExample) |
| CN (1) | CN114450618B (enExample) |
| DE (1) | DE112020004669T5 (enExample) |
| TW (1) | TWI867052B (enExample) |
| WO (1) | WO2021065399A1 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102023132555A1 (de) * | 2023-11-22 | 2025-05-22 | Tdk Electronics Ag | Mikroelektromechanischer Spiegel, Verfahren zur Herstellung eines mikroelektromechanischen Spiegels, Verfahren zum Betrieb eines mikroelektromechanischen Spiegels, Projektionsvorrichtung und Verwendung eines mikroelektromechanischen Spiegels |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004069731A (ja) | 2002-08-01 | 2004-03-04 | Ricoh Co Ltd | 振動ミラー、振動ミラーの振れ角制御方法、光書込装置及び画像形成装置 |
| WO2019107312A1 (ja) | 2017-12-01 | 2019-06-06 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI274184B (en) * | 2002-10-16 | 2007-02-21 | Nikon Corp | Optical element, thin-film structural body, optical switch, and optical element manufacturing method |
| DE102008013098B4 (de) * | 2007-04-02 | 2012-02-09 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanisches System mit Temperaturstabilisierung |
| US10551613B2 (en) * | 2010-10-20 | 2020-02-04 | Tiansheng ZHOU | Micro-electro-mechanical systems micromirrors and micromirror arrays |
| CN103518154A (zh) * | 2011-04-26 | 2014-01-15 | 丰田自动车株式会社 | 反射镜装置 |
| US9651775B2 (en) * | 2012-12-20 | 2017-05-16 | Intel Corporation | MEMS device |
| JP2015036782A (ja) | 2013-08-14 | 2015-02-23 | レーザーテック株式会社 | ミラー駆動装置、及び、ミラー駆動方法 |
| JP6459392B2 (ja) * | 2014-10-28 | 2019-01-30 | ミツミ電機株式会社 | 光走査装置 |
| JP6560897B2 (ja) * | 2015-05-20 | 2019-08-14 | スタンレー電気株式会社 | 圧電膜の積層体とその製造方法及び光スキャナ |
| JP2018081176A (ja) * | 2016-11-15 | 2018-05-24 | 株式会社デンソー | Ｍｅｍｓデバイス |
| JP7459580B2 (ja) * | 2020-03-16 | 2024-04-02 | 株式会社リコー | 可動装置、画像投影装置、ヘッドアップディスプレイ、レーザヘッドランプ、ヘッドマウントディスプレイ、物体認識装置、及び移動体 |
-
2019
- 2019-09-30 JP JP2019178842A patent/JP7481821B2/ja active Active
-
2020
- 2020-09-09 WO PCT/JP2020/034183 patent/WO2021065399A1/ja not_active Ceased
- 2020-09-09 CN CN202080068254.0A patent/CN114450618B/zh active Active
- 2020-09-09 DE DE112020004669.9T patent/DE112020004669T5/de active Pending
- 2020-09-09 US US17/763,285 patent/US20220342206A1/en not_active Abandoned
- 2020-09-23 TW TW109132879A patent/TWI867052B/zh active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004069731A (ja) | 2002-08-01 | 2004-03-04 | Ricoh Co Ltd | 振動ミラー、振動ミラーの振れ角制御方法、光書込装置及び画像形成装置 |
| WO2019107312A1 (ja) | 2017-12-01 | 2019-06-06 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202127095A (zh) | 2021-07-16 |
| CN114450618B (zh) | 2024-03-08 |
| US20220342206A1 (en) | 2022-10-27 |
| DE112020004669T5 (de) | 2022-06-15 |
| WO2021065399A1 (ja) | 2021-04-08 |
| JP2021056368A (ja) | 2021-04-08 |
| TWI867052B (zh) | 2024-12-21 |
| CN114450618A (zh) | 2022-05-06 |
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