JP2021056368A5 - - Google Patents

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Publication number
JP2021056368A5
JP2021056368A5 JP2019178842A JP2019178842A JP2021056368A5 JP 2021056368 A5 JP2021056368 A5 JP 2021056368A5 JP 2019178842 A JP2019178842 A JP 2019178842A JP 2019178842 A JP2019178842 A JP 2019178842A JP 2021056368 A5 JP2021056368 A5 JP 2021056368A5
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JP
Japan
Prior art keywords
heating
section
optical device
movable
elastic connecting
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JP2019178842A
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English (en)
Japanese (ja)
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JP7481821B2 (ja
JP2021056368A (ja
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Priority claimed from JP2019178842A external-priority patent/JP7481821B2/ja
Priority to JP2019178842A priority Critical patent/JP7481821B2/ja
Priority to US17/763,285 priority patent/US20220342206A1/en
Priority to DE112020004669.9T priority patent/DE112020004669T5/de
Priority to PCT/JP2020/034183 priority patent/WO2021065399A1/ja
Priority to CN202080068254.0A priority patent/CN114450618B/zh
Priority to TW109132879A priority patent/TWI867052B/zh
Publication of JP2021056368A publication Critical patent/JP2021056368A/ja
Publication of JP2021056368A5 publication Critical patent/JP2021056368A5/ja
Publication of JP7481821B2 publication Critical patent/JP7481821B2/ja
Application granted granted Critical
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JP2019178842A 2019-09-30 2019-09-30 光学デバイス Active JP7481821B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2019178842A JP7481821B2 (ja) 2019-09-30 2019-09-30 光学デバイス
CN202080068254.0A CN114450618B (zh) 2019-09-30 2020-09-09 光学装置
DE112020004669.9T DE112020004669T5 (de) 2019-09-30 2020-09-09 Optikvorrichtung
PCT/JP2020/034183 WO2021065399A1 (ja) 2019-09-30 2020-09-09 光学デバイス
US17/763,285 US20220342206A1 (en) 2019-09-30 2020-09-09 Optical device
TW109132879A TWI867052B (zh) 2019-09-30 2020-09-23 光學裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019178842A JP7481821B2 (ja) 2019-09-30 2019-09-30 光学デバイス

Publications (3)

Publication Number Publication Date
JP2021056368A JP2021056368A (ja) 2021-04-08
JP2021056368A5 true JP2021056368A5 (enExample) 2022-10-05
JP7481821B2 JP7481821B2 (ja) 2024-05-13

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ID=75270662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019178842A Active JP7481821B2 (ja) 2019-09-30 2019-09-30 光学デバイス

Country Status (6)

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US (1) US20220342206A1 (enExample)
JP (1) JP7481821B2 (enExample)
CN (1) CN114450618B (enExample)
DE (1) DE112020004669T5 (enExample)
TW (1) TWI867052B (enExample)
WO (1) WO2021065399A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102023132555A1 (de) * 2023-11-22 2025-05-22 Tdk Electronics Ag Mikroelektromechanischer Spiegel, Verfahren zur Herstellung eines mikroelektromechanischen Spiegels, Verfahren zum Betrieb eines mikroelektromechanischen Spiegels, Projektionsvorrichtung und Verwendung eines mikroelektromechanischen Spiegels

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4172627B2 (ja) 2002-08-01 2008-10-29 株式会社リコー 振動ミラー、光書込装置及び画像形成装置
TWI274184B (en) * 2002-10-16 2007-02-21 Nikon Corp Optical element, thin-film structural body, optical switch, and optical element manufacturing method
DE102008013098B4 (de) * 2007-04-02 2012-02-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches System mit Temperaturstabilisierung
US10551613B2 (en) * 2010-10-20 2020-02-04 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
CN103518154A (zh) * 2011-04-26 2014-01-15 丰田自动车株式会社 反射镜装置
US9651775B2 (en) * 2012-12-20 2017-05-16 Intel Corporation MEMS device
JP2015036782A (ja) 2013-08-14 2015-02-23 レーザーテック株式会社 ミラー駆動装置、及び、ミラー駆動方法
JP6459392B2 (ja) * 2014-10-28 2019-01-30 ミツミ電機株式会社 光走査装置
JP6560897B2 (ja) * 2015-05-20 2019-08-14 スタンレー電気株式会社 圧電膜の積層体とその製造方法及び光スキャナ
JP2018081176A (ja) * 2016-11-15 2018-05-24 株式会社デンソー Ｍｅｍｓデバイス
JP6585147B2 (ja) 2017-12-01 2019-10-02 浜松ホトニクス株式会社 アクチュエータ装置
JP7459580B2 (ja) * 2020-03-16 2024-04-02 株式会社リコー 可動装置、画像投影装置、ヘッドアップディスプレイ、レーザヘッドランプ、ヘッドマウントディスプレイ、物体認識装置、及び移動体

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