DE112020004669T5 - Optikvorrichtung - Google Patents
Optikvorrichtung Download PDFInfo
- Publication number
- DE112020004669T5 DE112020004669T5 DE112020004669.9T DE112020004669T DE112020004669T5 DE 112020004669 T5 DE112020004669 T5 DE 112020004669T5 DE 112020004669 T DE112020004669 T DE 112020004669T DE 112020004669 T5 DE112020004669 T5 DE 112020004669T5
- Authority
- DE
- Germany
- Prior art keywords
- movable portion
- heater
- controller
- heating
- optical device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims abstract description 180
- 230000003287 optical effect Effects 0.000 claims abstract description 74
- 230000004044 response Effects 0.000 claims abstract description 12
- 230000005489 elastic deformation Effects 0.000 claims abstract description 5
- 230000005484 gravity Effects 0.000 claims description 7
- 230000007423 decrease Effects 0.000 claims description 6
- 238000000034 method Methods 0.000 description 46
- 230000008569 process Effects 0.000 description 33
- 230000008859 change Effects 0.000 description 16
- 238000001816 cooling Methods 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 230000006641 stabilisation Effects 0.000 description 6
- 238000011105 stabilization Methods 0.000 description 6
- 229910000838 Al alloy Inorganic materials 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- BUHVIAUBTBOHAG-FOYDDCNASA-N (2r,3r,4s,5r)-2-[6-[[2-(3,5-dimethoxyphenyl)-2-(2-methylphenyl)ethyl]amino]purin-9-yl]-5-(hydroxymethyl)oxolane-3,4-diol Chemical compound COC1=CC(OC)=CC(C(CNC=2C=3N=CN(C=3N=CN=2)[C@H]2[C@@H]([C@H](O)[C@@H](CO)O2)O)C=2C(=CC=CC=2)C)=C1 BUHVIAUBTBOHAG-FOYDDCNASA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000013024 troubleshooting Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
- G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019-178842 | 2019-09-30 | ||
| JP2019178842A JP7481821B2 (ja) | 2019-09-30 | 2019-09-30 | 光学デバイス |
| PCT/JP2020/034183 WO2021065399A1 (ja) | 2019-09-30 | 2020-09-09 | 光学デバイス |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE112020004669T5 true DE112020004669T5 (de) | 2022-06-15 |
Family
ID=75270662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE112020004669.9T Pending DE112020004669T5 (de) | 2019-09-30 | 2020-09-09 | Optikvorrichtung |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20220342206A1 (enExample) |
| JP (1) | JP7481821B2 (enExample) |
| CN (1) | CN114450618B (enExample) |
| DE (1) | DE112020004669T5 (enExample) |
| TW (1) | TWI867052B (enExample) |
| WO (1) | WO2021065399A1 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102023132555A1 (de) * | 2023-11-22 | 2025-05-22 | Tdk Electronics Ag | Mikroelektromechanischer Spiegel, Verfahren zur Herstellung eines mikroelektromechanischen Spiegels, Verfahren zum Betrieb eines mikroelektromechanischen Spiegels, Projektionsvorrichtung und Verwendung eines mikroelektromechanischen Spiegels |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015036782A (ja) | 2013-08-14 | 2015-02-23 | レーザーテック株式会社 | ミラー駆動装置、及び、ミラー駆動方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4172627B2 (ja) | 2002-08-01 | 2008-10-29 | 株式会社リコー | 振動ミラー、光書込装置及び画像形成装置 |
| TWI274184B (en) * | 2002-10-16 | 2007-02-21 | Nikon Corp | Optical element, thin-film structural body, optical switch, and optical element manufacturing method |
| DE102008013098B4 (de) * | 2007-04-02 | 2012-02-09 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanisches System mit Temperaturstabilisierung |
| US10551613B2 (en) * | 2010-10-20 | 2020-02-04 | Tiansheng ZHOU | Micro-electro-mechanical systems micromirrors and micromirror arrays |
| CN103518154A (zh) * | 2011-04-26 | 2014-01-15 | 丰田自动车株式会社 | 反射镜装置 |
| US9651775B2 (en) * | 2012-12-20 | 2017-05-16 | Intel Corporation | MEMS device |
| JP6459392B2 (ja) * | 2014-10-28 | 2019-01-30 | ミツミ電機株式会社 | 光走査装置 |
| JP6560897B2 (ja) * | 2015-05-20 | 2019-08-14 | スタンレー電気株式会社 | 圧電膜の積層体とその製造方法及び光スキャナ |
| JP2018081176A (ja) * | 2016-11-15 | 2018-05-24 | 株式会社デンソー | Ｍｅｍｓデバイス |
| JP6585147B2 (ja) | 2017-12-01 | 2019-10-02 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
| JP7459580B2 (ja) * | 2020-03-16 | 2024-04-02 | 株式会社リコー | 可動装置、画像投影装置、ヘッドアップディスプレイ、レーザヘッドランプ、ヘッドマウントディスプレイ、物体認識装置、及び移動体 |
-
2019
- 2019-09-30 JP JP2019178842A patent/JP7481821B2/ja active Active
-
2020
- 2020-09-09 WO PCT/JP2020/034183 patent/WO2021065399A1/ja not_active Ceased
- 2020-09-09 CN CN202080068254.0A patent/CN114450618B/zh active Active
- 2020-09-09 DE DE112020004669.9T patent/DE112020004669T5/de active Pending
- 2020-09-09 US US17/763,285 patent/US20220342206A1/en not_active Abandoned
- 2020-09-23 TW TW109132879A patent/TWI867052B/zh active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015036782A (ja) | 2013-08-14 | 2015-02-23 | レーザーテック株式会社 | ミラー駆動装置、及び、ミラー駆動方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202127095A (zh) | 2021-07-16 |
| CN114450618B (zh) | 2024-03-08 |
| JP7481821B2 (ja) | 2024-05-13 |
| US20220342206A1 (en) | 2022-10-27 |
| WO2021065399A1 (ja) | 2021-04-08 |
| JP2021056368A (ja) | 2021-04-08 |
| TWI867052B (zh) | 2024-12-21 |
| CN114450618A (zh) | 2022-05-06 |
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