TWI867052B - 光學裝置 - Google Patents

光學裝置 Download PDF

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Publication number
TWI867052B
TWI867052B TW109132879A TW109132879A TWI867052B TW I867052 B TWI867052 B TW I867052B TW 109132879 A TW109132879 A TW 109132879A TW 109132879 A TW109132879 A TW 109132879A TW I867052 B TWI867052 B TW I867052B
Authority
TW
Taiwan
Prior art keywords
heating
unit
elastic connection
movable
control unit
Prior art date
Application number
TW109132879A
Other languages
English (en)
Chinese (zh)
Other versions
TW202127095A (zh
Inventor
岩科進也
中村重幸
櫻井直人
森永勇樹
鈴木大幾
Original Assignee
日商濱松赫德尼古斯股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商濱松赫德尼古斯股份有限公司 filed Critical 日商濱松赫德尼古斯股份有限公司
Publication of TW202127095A publication Critical patent/TW202127095A/zh
Application granted granted Critical
Publication of TWI867052B publication Critical patent/TWI867052B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
TW109132879A 2019-09-30 2020-09-23 光學裝置 TWI867052B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-178842 2019-09-30
JP2019178842A JP7481821B2 (ja) 2019-09-30 2019-09-30 光学デバイス

Publications (2)

Publication Number Publication Date
TW202127095A TW202127095A (zh) 2021-07-16
TWI867052B true TWI867052B (zh) 2024-12-21

Family

ID=75270662

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109132879A TWI867052B (zh) 2019-09-30 2020-09-23 光學裝置

Country Status (6)

Country Link
US (1) US20220342206A1 (enExample)
JP (1) JP7481821B2 (enExample)
CN (1) CN114450618B (enExample)
DE (1) DE112020004669T5 (enExample)
TW (1) TWI867052B (enExample)
WO (1) WO2021065399A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102023132555A1 (de) * 2023-11-22 2025-05-22 Tdk Electronics Ag Mikroelektromechanischer Spiegel, Verfahren zur Herstellung eines mikroelektromechanischen Spiegels, Verfahren zum Betrieb eines mikroelektromechanischen Spiegels, Projektionsvorrichtung und Verwendung eines mikroelektromechanischen Spiegels

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004069731A (ja) * 2002-08-01 2004-03-04 Ricoh Co Ltd 振動ミラー、振動ミラーの振れ角制御方法、光書込装置及び画像形成装置
TW200406595A (en) * 2002-10-16 2004-05-01 Nippon Kogaku Kk Optical element, thin-film structural body, optical switch, and optical element manufacturing method
US20160341956A1 (en) * 2015-05-20 2016-11-24 Stanley Electric Co., Ltd. Piezoelectric device including conductive layer, its manufacturing method and optical deflector
WO2019107312A1 (ja) * 2017-12-01 2019-06-06 浜松ホトニクス株式会社 アクチュエータ装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008013098B4 (de) * 2007-04-02 2012-02-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches System mit Temperaturstabilisierung
US10551613B2 (en) * 2010-10-20 2020-02-04 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
CN103518154A (zh) * 2011-04-26 2014-01-15 丰田自动车株式会社 反射镜装置
US9651775B2 (en) * 2012-12-20 2017-05-16 Intel Corporation MEMS device
JP2015036782A (ja) 2013-08-14 2015-02-23 レーザーテック株式会社 ミラー駆動装置、及び、ミラー駆動方法
JP6459392B2 (ja) * 2014-10-28 2019-01-30 ミツミ電機株式会社 光走査装置
JP2018081176A (ja) * 2016-11-15 2018-05-24 株式会社デンソー Ｍｅｍｓデバイス
JP7459580B2 (ja) * 2020-03-16 2024-04-02 株式会社リコー 可動装置、画像投影装置、ヘッドアップディスプレイ、レーザヘッドランプ、ヘッドマウントディスプレイ、物体認識装置、及び移動体

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004069731A (ja) * 2002-08-01 2004-03-04 Ricoh Co Ltd 振動ミラー、振動ミラーの振れ角制御方法、光書込装置及び画像形成装置
TW200406595A (en) * 2002-10-16 2004-05-01 Nippon Kogaku Kk Optical element, thin-film structural body, optical switch, and optical element manufacturing method
US20160341956A1 (en) * 2015-05-20 2016-11-24 Stanley Electric Co., Ltd. Piezoelectric device including conductive layer, its manufacturing method and optical deflector
WO2019107312A1 (ja) * 2017-12-01 2019-06-06 浜松ホトニクス株式会社 アクチュエータ装置

Also Published As

Publication number Publication date
TW202127095A (zh) 2021-07-16
CN114450618B (zh) 2024-03-08
JP7481821B2 (ja) 2024-05-13
US20220342206A1 (en) 2022-10-27
DE112020004669T5 (de) 2022-06-15
WO2021065399A1 (ja) 2021-04-08
JP2021056368A (ja) 2021-04-08
CN114450618A (zh) 2022-05-06

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