CN114450618B - 光学装置 - Google Patents

光学装置 Download PDF

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Publication number
CN114450618B
CN114450618B CN202080068254.0A CN202080068254A CN114450618B CN 114450618 B CN114450618 B CN 114450618B CN 202080068254 A CN202080068254 A CN 202080068254A CN 114450618 B CN114450618 B CN 114450618B
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CN
China
Prior art keywords
heating
unit
optical device
movable
elastic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202080068254.0A
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English (en)
Chinese (zh)
Other versions
CN114450618A (zh
Inventor
岩科进也
中村重幸
樱井直人
森永勇树
铃木大几
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Hamamatsu Photonics KK
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Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Publication of CN114450618A publication Critical patent/CN114450618A/zh
Application granted granted Critical
Publication of CN114450618B publication Critical patent/CN114450618B/zh
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CN202080068254.0A 2019-09-30 2020-09-09 光学装置 Active CN114450618B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019-178842 2019-09-30
JP2019178842A JP7481821B2 (ja) 2019-09-30 2019-09-30 光学デバイス
PCT/JP2020/034183 WO2021065399A1 (ja) 2019-09-30 2020-09-09 光学デバイス

Publications (2)

Publication Number Publication Date
CN114450618A CN114450618A (zh) 2022-05-06
CN114450618B true CN114450618B (zh) 2024-03-08

Family

ID=75270662

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080068254.0A Active CN114450618B (zh) 2019-09-30 2020-09-09 光学装置

Country Status (6)

Country Link
US (1) US20220342206A1 (enExample)
JP (1) JP7481821B2 (enExample)
CN (1) CN114450618B (enExample)
DE (1) DE112020004669T5 (enExample)
TW (1) TWI867052B (enExample)
WO (1) WO2021065399A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102023132555A1 (de) * 2023-11-22 2025-05-22 Tdk Electronics Ag Mikroelektromechanischer Spiegel, Verfahren zur Herstellung eines mikroelektromechanischen Spiegels, Verfahren zum Betrieb eines mikroelektromechanischen Spiegels, Projektionsvorrichtung und Verwendung eines mikroelektromechanischen Spiegels

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004069731A (ja) * 2002-08-01 2004-03-04 Ricoh Co Ltd 振動ミラー、振動ミラーの振れ角制御方法、光書込装置及び画像形成装置
CN101301992A (zh) * 2007-04-02 2008-11-12 弗劳恩霍夫应用研究促进协会 微机械装置及在其上调节确定温度或确定温度过程的方法
CN103518154A (zh) * 2011-04-26 2014-01-15 丰田自动车株式会社 反射镜装置
CN105549201A (zh) * 2014-10-28 2016-05-04 三美电机株式会社 光扫描装置
WO2019107312A1 (ja) * 2017-12-01 2019-06-06 浜松ホトニクス株式会社 アクチュエータ装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI274184B (en) * 2002-10-16 2007-02-21 Nikon Corp Optical element, thin-film structural body, optical switch, and optical element manufacturing method
US10551613B2 (en) * 2010-10-20 2020-02-04 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
US9651775B2 (en) * 2012-12-20 2017-05-16 Intel Corporation MEMS device
JP2015036782A (ja) 2013-08-14 2015-02-23 レーザーテック株式会社 ミラー駆動装置、及び、ミラー駆動方法
JP6560897B2 (ja) * 2015-05-20 2019-08-14 スタンレー電気株式会社 圧電膜の積層体とその製造方法及び光スキャナ
JP2018081176A (ja) * 2016-11-15 2018-05-24 株式会社デンソー Ｍｅｍｓデバイス
JP7459580B2 (ja) * 2020-03-16 2024-04-02 株式会社リコー 可動装置、画像投影装置、ヘッドアップディスプレイ、レーザヘッドランプ、ヘッドマウントディスプレイ、物体認識装置、及び移動体

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004069731A (ja) * 2002-08-01 2004-03-04 Ricoh Co Ltd 振動ミラー、振動ミラーの振れ角制御方法、光書込装置及び画像形成装置
CN101301992A (zh) * 2007-04-02 2008-11-12 弗劳恩霍夫应用研究促进协会 微机械装置及在其上调节确定温度或确定温度过程的方法
CN103518154A (zh) * 2011-04-26 2014-01-15 丰田自动车株式会社 反射镜装置
CN105549201A (zh) * 2014-10-28 2016-05-04 三美电机株式会社 光扫描装置
WO2019107312A1 (ja) * 2017-12-01 2019-06-06 浜松ホトニクス株式会社 アクチュエータ装置

Also Published As

Publication number Publication date
TW202127095A (zh) 2021-07-16
JP7481821B2 (ja) 2024-05-13
US20220342206A1 (en) 2022-10-27
DE112020004669T5 (de) 2022-06-15
WO2021065399A1 (ja) 2021-04-08
JP2021056368A (ja) 2021-04-08
TWI867052B (zh) 2024-12-21
CN114450618A (zh) 2022-05-06

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