JP7475973B2 - 光学式エンコーダ及び制御装置 - Google Patents

光学式エンコーダ及び制御装置 Download PDF

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Publication number
JP7475973B2
JP7475973B2 JP2020099491A JP2020099491A JP7475973B2 JP 7475973 B2 JP7475973 B2 JP 7475973B2 JP 2020099491 A JP2020099491 A JP 2020099491A JP 2020099491 A JP2020099491 A JP 2020099491A JP 7475973 B2 JP7475973 B2 JP 7475973B2
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Japan
Prior art keywords
light receiving
receiving element
signal
diffraction grating
light
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JP2020099491A
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Japanese (ja)
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JP2021193354A (ja
JP2021193354A5 (enExample
Inventor
千裕 名倉
卓典 植村
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Canon Inc
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Canon Inc
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Priority to JP2020099491A priority Critical patent/JP7475973B2/ja
Priority to US17/337,918 priority patent/US11946780B2/en
Priority to DE102021114506.6A priority patent/DE102021114506A1/de
Priority to GB2108112.0A priority patent/GB2596916B/en
Publication of JP2021193354A publication Critical patent/JP2021193354A/ja
Publication of JP2021193354A5 publication Critical patent/JP2021193354A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/28—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication
    • G01D5/30—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication the beams of light being detected by photocells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/28—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication
    • G01D5/285—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication using a movable mirror
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776—Absolute encoders with analogue or digital scales
    • G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP2020099491A 2020-06-08 2020-06-08 光学式エンコーダ及び制御装置 Active JP7475973B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2020099491A JP7475973B2 (ja) 2020-06-08 2020-06-08 光学式エンコーダ及び制御装置
US17/337,918 US11946780B2 (en) 2020-06-08 2021-06-03 Optical encoder and control apparatus
DE102021114506.6A DE102021114506A1 (de) 2020-06-08 2021-06-07 Optischer Encoder und Steuergerät
GB2108112.0A GB2596916B (en) 2020-06-08 2021-06-07 Optical encoder and control apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020099491A JP7475973B2 (ja) 2020-06-08 2020-06-08 光学式エンコーダ及び制御装置

Publications (3)

Publication Number Publication Date
JP2021193354A JP2021193354A (ja) 2021-12-23
JP2021193354A5 JP2021193354A5 (enExample) 2023-06-08
JP7475973B2 true JP7475973B2 (ja) 2024-04-30

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JP2020099491A Active JP7475973B2 (ja) 2020-06-08 2020-06-08 光学式エンコーダ及び制御装置

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US (1) US11946780B2 (enExample)
JP (1) JP7475973B2 (enExample)
DE (1) DE102021114506A1 (enExample)
GB (1) GB2596916B (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024004884A (ja) * 2022-06-29 2024-01-17 キヤノン株式会社 触覚センサ及び触覚センサを備えた装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004520591A (ja) 2001-02-14 2004-07-08 レニショウ　パブリック　リミテッド　カンパニー 位置決定システム
JP2004212243A (ja) 2003-01-06 2004-07-29 Canon Inc 格子干渉型光学式エンコーダ
JP2015187605A (ja) 2014-03-14 2015-10-29 キヤノンプレシジョン株式会社 エンコーダ
JP2016102708A (ja) 2014-11-28 2016-06-02 株式会社ミツトヨ 光学式エンコーダ
JP2016136131A (ja) 2015-01-16 2016-07-28 キヤノン株式会社 位置検出装置、レンズ装置、撮像システム、工作装置、露光装置、位置検出方法、プログラム、記憶媒体

Family Cites Families (16)

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Publication number Priority date Publication date Assignee Title
NL8101669A (nl) * 1981-04-03 1982-11-01 Philips Nv Inrichting voor het detekteren van de stand van een voorwerp.
JPH0755457Y2 (ja) * 1991-05-13 1995-12-20 株式会社ミツトヨ 光電型エンコーダ
DE69320716T3 (de) 1992-06-30 2011-05-19 Canon K.K. Gerät zur Detektion von Verschiebungsinformation
JP3028716B2 (ja) * 1993-09-29 2000-04-04 キヤノン株式会社 光学式変位センサ
US6229140B1 (en) * 1995-10-27 2001-05-08 Canon Kabushiki Kaisha Displacement information detection apparatus
US6674066B1 (en) * 1999-04-16 2004-01-06 Canon Kabushiki Kaisha Encoder
JP4473975B2 (ja) 1999-04-16 2010-06-02 キヤノン株式会社 エンコーダ
JP4981203B2 (ja) * 2000-08-01 2012-07-18 オリンパス株式会社 光学式エンコーダー
JP4869628B2 (ja) 2005-05-26 2012-02-08 オリンパス株式会社 光学式エンコーダ
JP4724495B2 (ja) * 2005-08-29 2011-07-13 キヤノン株式会社 光学式エンコーダ
US7608813B1 (en) * 2008-11-18 2009-10-27 Mitutoyo Corporation Scale track configuration for absolute optical encoder including a detector electronics with plurality of track detector portions
CN106104216B (zh) * 2013-10-01 2018-11-02 瑞尼斯豪公司 编码器设备
DE102014212268A1 (de) * 2014-06-26 2016-01-14 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US10215596B2 (en) * 2015-01-16 2019-02-26 Canon Kabushiki Kaisha Position detection apparatus, lens apparatus, image pickup system, machine tool apparatus, exposure apparatus, position detection method, and non-transitory computer-readable storage medium which are capable of detecting reference position with high accuracy
EP3064903B1 (en) 2015-03-06 2018-06-13 Canon Precision Inc. Encoder
JP6400036B2 (ja) * 2016-03-14 2018-10-03 キヤノン株式会社 位置検出装置、工作装置、および、露光装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004520591A (ja) 2001-02-14 2004-07-08 レニショウ　パブリック　リミテッド　カンパニー 位置決定システム
JP2004212243A (ja) 2003-01-06 2004-07-29 Canon Inc 格子干渉型光学式エンコーダ
JP2015187605A (ja) 2014-03-14 2015-10-29 キヤノンプレシジョン株式会社 エンコーダ
JP2016102708A (ja) 2014-11-28 2016-06-02 株式会社ミツトヨ 光学式エンコーダ
JP2016136131A (ja) 2015-01-16 2016-07-28 キヤノン株式会社 位置検出装置、レンズ装置、撮像システム、工作装置、露光装置、位置検出方法、プログラム、記憶媒体

Also Published As

Publication number Publication date
DE102021114506A1 (de) 2021-12-09
US20210381856A1 (en) 2021-12-09
JP2021193354A (ja) 2021-12-23
US11946780B2 (en) 2024-04-02
GB2596916A (en) 2022-01-12
GB2596916B (en) 2022-09-28
GB202108112D0 (en) 2021-07-21

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