JP2021193354A5 - - Google Patents

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Publication number
JP2021193354A5
JP2021193354A5 JP2020099491A JP2020099491A JP2021193354A5 JP 2021193354 A5 JP2021193354 A5 JP 2021193354A5 JP 2020099491 A JP2020099491 A JP 2020099491A JP 2020099491 A JP2020099491 A JP 2020099491A JP 2021193354 A5 JP2021193354 A5 JP 2021193354A5
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JP
Japan
Prior art keywords
receiving element
light receiving
light
diffraction grating
optical encoder
Prior art date
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Granted
Application number
JP2020099491A
Other languages
English (en)
Japanese (ja)
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JP2021193354A (ja
JP7475973B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2020099491A priority Critical patent/JP7475973B2/ja
Priority claimed from JP2020099491A external-priority patent/JP7475973B2/ja
Priority to US17/337,918 priority patent/US11946780B2/en
Priority to GB2108112.0A priority patent/GB2596916B/en
Priority to DE102021114506.6A priority patent/DE102021114506A1/de
Publication of JP2021193354A publication Critical patent/JP2021193354A/ja
Publication of JP2021193354A5 publication Critical patent/JP2021193354A5/ja
Application granted granted Critical
Publication of JP7475973B2 publication Critical patent/JP7475973B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2020099491A 2020-06-08 2020-06-08 光学式エンコーダ及び制御装置 Active JP7475973B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2020099491A JP7475973B2 (ja) 2020-06-08 2020-06-08 光学式エンコーダ及び制御装置
US17/337,918 US11946780B2 (en) 2020-06-08 2021-06-03 Optical encoder and control apparatus
GB2108112.0A GB2596916B (en) 2020-06-08 2021-06-07 Optical encoder and control apparatus
DE102021114506.6A DE102021114506A1 (de) 2020-06-08 2021-06-07 Optischer Encoder und Steuergerät

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020099491A JP7475973B2 (ja) 2020-06-08 2020-06-08 光学式エンコーダ及び制御装置

Publications (3)

Publication Number Publication Date
JP2021193354A JP2021193354A (ja) 2021-12-23
JP2021193354A5 true JP2021193354A5 (enExample) 2023-06-08
JP7475973B2 JP7475973B2 (ja) 2024-04-30

Family

ID=76838741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020099491A Active JP7475973B2 (ja) 2020-06-08 2020-06-08 光学式エンコーダ及び制御装置

Country Status (4)

Country Link
US (1) US11946780B2 (enExample)
JP (1) JP7475973B2 (enExample)
DE (1) DE102021114506A1 (enExample)
GB (1) GB2596916B (enExample)

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8101669A (nl) * 1981-04-03 1982-11-01 Philips Nv Inrichting voor het detekteren van de stand van een voorwerp.
JPH0755457Y2 (ja) * 1991-05-13 1995-12-20 株式会社ミツトヨ 光電型エンコーダ
DE69320716T3 (de) 1992-06-30 2011-05-19 Canon K.K. Gerät zur Detektion von Verschiebungsinformation
JP3028716B2 (ja) * 1993-09-29 2000-04-04 キヤノン株式会社 光学式変位センサ
US6229140B1 (en) * 1995-10-27 2001-05-08 Canon Kabushiki Kaisha Displacement information detection apparatus
JP4473975B2 (ja) 1999-04-16 2010-06-02 キヤノン株式会社 エンコーダ
EP1045227B2 (en) * 1999-04-16 2012-04-18 Canon Kabushiki Kaisha Encoder
JP4981203B2 (ja) * 2000-08-01 2012-07-18 オリンパス株式会社 光学式エンコーダー
GB0103582D0 (en) * 2001-02-14 2001-03-28 Renishaw Plc Position determination system
JP2004212243A (ja) * 2003-01-06 2004-07-29 Canon Inc 格子干渉型光学式エンコーダ
JP4869628B2 (ja) 2005-05-26 2012-02-08 オリンパス株式会社 光学式エンコーダ
JP4724495B2 (ja) * 2005-08-29 2011-07-13 キヤノン株式会社 光学式エンコーダ
US7608813B1 (en) * 2008-11-18 2009-10-27 Mitutoyo Corporation Scale track configuration for absolute optical encoder including a detector electronics with plurality of track detector portions
WO2015049173A1 (en) * 2013-10-01 2015-04-09 Renishaw Plc Reference mark detector arrangement
JP6487724B2 (ja) * 2014-03-14 2019-03-20 キヤノンプレシジョン株式会社 エンコーダ
DE102014212268A1 (de) * 2014-06-26 2016-01-14 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP6437802B2 (ja) * 2014-11-28 2018-12-12 株式会社ミツトヨ 光学式エンコーダ
US10215596B2 (en) * 2015-01-16 2019-02-26 Canon Kabushiki Kaisha Position detection apparatus, lens apparatus, image pickup system, machine tool apparatus, exposure apparatus, position detection method, and non-transitory computer-readable storage medium which are capable of detecting reference position with high accuracy
JP6440609B2 (ja) * 2015-01-16 2018-12-19 キヤノン株式会社 位置検出装置、レンズ装置、撮像システム、工作装置、露光装置、位置検出方法、プログラム、記憶媒体
EP3064903B1 (en) 2015-03-06 2018-06-13 Canon Precision Inc. Encoder
JP6400036B2 (ja) * 2016-03-14 2018-10-03 キヤノン株式会社 位置検出装置、工作装置、および、露光装置

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