JP7447126B2 - 光学積層体の堆積及び装置内計測 - Google Patents
光学積層体の堆積及び装置内計測 Download PDFInfo
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Description
[0001]本開示の実施形態は概して、処理ツール内で光学積層体の層を堆積させ、測定することに関する。
[0002]処理ツールは、光学積層体を形成するために基板上に材料(誘電体層や膜など)を堆積させるのに使用される、様々な堆積チャンバを含みうる。光学積層体を形成する場合、一般に、膜は可能な限り均一かつ精密に堆積される。膜が均一かつ精密に堆積されたかどうかを判定するために、積層体は、堆積チャンバから取り出されて外部計測法を使用して測定される。しかし、外部計測アセンブリを利用することで、膜が空気に曝露され、膜の特性に望ましくない変化が生じる。膜の特性が変化することにより、様々なエラー又は不具合(膜の表面若しくは界面が劣化するか、又は不規則になるなど)が生じうる。更に、膜を測定するために処理ツール環境から積層体を取り出すことには時間がかかることがあり、これにより、生産時間が短くなり、スループットが低下する。
Claims (15)
- 処理ツールであって、
第1移送チャンバと、
前記第1移送チャンバに連結された第2移送チャンバであって、前記第1移送チャンバ又は前記第2移送チャンバに一又は複数の処理チャンバが連結されている、第2移送チャンバと、
前記第1移送チャンバと前記第2移送チャンバとの間の第1冷却チャンバ内に配置された搭載型計測ユニットとを備え、
前記第1移送チャンバ、前記第2移送チャンバ、前記第1冷却チャンバ及び前記搭載型計測ユニットは閉鎖環境内に配置され、
前記搭載型計測ユニットが、
光学積層体の一又は複数の層の一又は複数の光学特性を測定することと、
前記一又は複数の層にエラーがあればそれを、測定された前記一又は複数の光学特性に基づいて特定することと、
前記処理ツールにリアルタイムの光学応答フィードバックを提供することと、を行うよう構成され、
前記処理ツールは、後続して堆積される層において、測定された層で検出された前記エラーを補償するために、前記搭載型計測ユニットからの前記フィードバックに基づいて、前記処理ツールに配置されたプロセスエンジニアリングノブとハードウェアエンジニアリングノブのうちの少なくとも一方をチューニングするよう構成されている、
処理ツール。 - 前記搭載型計測ユニットがリフレクトメータとエリプソメータのうちの一又は複数を含む、請求項1に記載の処理ツール。
- 前記一又は複数の光学特性が、厚さ、光反射率スペクトル、光透過率スペクトル、光吸収スペクトル、屈折率、消衰係数、組成、ウエハの反り、及び応力、からなる群から選択される、請求項1に記載の処理ツール。
- 前記第1移送チャンバ又は前記第2移送チャンバに連結された前記一又は複数の処理チャンバのうちの、少なくとも1つの処理チャンバが、化学気相堆積チャンバである、請求項1に記載の処理ツール。
- 前記第1移送チャンバ又は前記第2移送チャンバに連結された前記一又は複数の処理チャンバのうちの、少なくとも1つの処理チャンバが、物理的気相堆積チャンバである、請求項1に記載の処理ツール。
- 光学積層体を形成する方法であって、
第1処理チャンバ内で基板上に第1の層を堆積させることと、
搭載型計測ユニットを使用して、前記第1の層の一又は複数の特性を測定することであって、前記搭載型計測ユニットが、処理ツールにフィードバックを提供するよう構成されている、前記第1の層の一又は複数の特性を測定することと、
後続の層における修正のために、前記第1の層の一又は複数のエラーを特定することと、
前記搭載型計測ユニットからの前記フィードバックに基づいて、前記第1の層で検出された前記エラーを補償するために、前記処理ツールに配置されたプロセスエンジニアリングノブとハードウェアエンジニアリングノブのうちの少なくとも一方をチューニングすることと、
第2処理チャンバ内で前記第1の層上に第2の層を堆積させることと、
前記搭載型計測ユニットを使用して、前記第2の層の一又は複数の特性を測定することとを含み、
前記搭載型計測ユニットが、第1冷却チャンバ内に配置され、
前記第1処理チャンバ、前記第2処理チャンバ、前記第1冷却チャンバ及び前記搭載型計測ユニットが閉鎖環境内に配置されている、
方法。 - 前記搭載型計測ユニットがリフレクトメータとエリプソメータのうちの一又は複数を含む、請求項6に記載の方法。
- 前記一又は複数の特性が、厚さ、光反射率スペクトル、光透過率スペクトル、光吸収スペクトル、屈折率、消衰係数、組成、ウエハの反り、及び応力、からなる群から選択される、請求項6に記載の方法。
- 前記第1の層の材料が、前記第2の層の材料とは異なる屈折率を有する、請求項6に記載の方法。
- 前記第1処理チャンバ又は前記第2処理チャンバ内で、前記第2の層の上に一又は複数の追加の層を堆積させることを更に含み、
追加の層が堆積されるたびに、前記追加の層の一又は複数の特性が前記搭載型計測ユニットを使用して測定され、前記追加の層の一又は複数のエラーが、後続の追加の層における修正のために特定される、請求項6に記載の方法。 - 後続の層における修正のために、前記第2の層の一又は複数のエラーを特定することと、
第3処理チャンバ内で前記第2の層上に第3の層を堆積させることと、
前記搭載型計測ユニットを使用して、前記第3の層の一又は複数の特性を測定することとを更に含む、請求項6に記載の方法。 - 処理ツールであって、
一又は複数の前面開口型統一ポッドに連結されたファクトリインターフェースと、
前記ファクトリインターフェースに連結された第1移送チャンバであって、ロボットアームの第1のセットを備える第1移送チャンバと、
前記第1移送チャンバに連結された第2移送チャンバであって、ロボットアームの第2セットを備える第2移送チャンバと、
前記第1移送チャンバ又は前記第2移送チャンバに連結された複数のチャンバであって、第1の複数の処理チャンバ及び複数のサポートチャンバを含む複数のチャンバと、
前記第1移送チャンバと前記第2移送チャンバとの間の第1冷却チャンバ内に配置された搭載型計測ユニットとを備え、
前記第1移送チャンバ、前記第2移送チャンバ、前記第1冷却チャンバ及び前記搭載型計測ユニットは真空環境内に配置され、
前記搭載型計測ユニットが、
光学積層体の一又は複数の層の一又は複数の光学特性を測定することと、
前記一又は複数の層にエラーがあればそれを、測定された前記一又は複数の光学特性に基づいて特定することと、
前記測定された一又は複数の光学特性に基づいて、前記処理ツールにリアルタイムの光学応答フィードバックを提供することと、を行うよう構成され、
前記処理ツールは、後続して堆積される層において、測定された層で検出された前記エラーを補償するために、前記搭載型計測ユニットからの前記フィードバックに基づいて、前記処理ツールに配置されたプロセスエンジニアリングノブとハードウェアエンジニアリングノブのうちの少なくとも一方をチューニングするよう構成されている、
処理ツール。 - 前記搭載型計測ユニットがリフレクトメータとエリプソメータのうちの一又は複数を含む、請求項12に記載の処理ツール。
- 前記一又は複数の光学特性が、厚さ、光反射率スペクトル、光透過率スペクトル、光吸収スペクトル、屈折率、消衰係数、組成、ウエハの反り、及び応力、からなる群から選択される、請求項12に記載の処理ツール。
- 前記第1の複数の処理チャンバ若しくは第2の複数の処理チャンバのうちの、少なくとも1つの処理チャンバが、物理的気相堆積チャンバであるか、又は
前記第1の複数の処理チャンバ若しくは前記第2の複数の処理チャンバのうちの、少なくとも1つの処理チャンバが、化学気相堆積チャンバである、請求項12に記載の処理ツール。
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