JP7249407B2 - 補完的なパターンのステーション設計 - Google Patents
補完的なパターンのステーション設計 Download PDFInfo
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- JP7249407B2 JP7249407B2 JP2021522037A JP2021522037A JP7249407B2 JP 7249407 B2 JP7249407 B2 JP 7249407B2 JP 2021522037 A JP2021522037 A JP 2021522037A JP 2021522037 A JP2021522037 A JP 2021522037A JP 7249407 B2 JP7249407 B2 JP 7249407B2
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- plasma
- pattern
- heater
- gas
- cooling channel
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68771—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting more than one semiconductor substrate
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/002—Cooling arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20214—Rotation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
- H01J2237/3321—CVD [Chemical Vapor Deposition]
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Description
Claims (8)
- 処理チャンバであって、
第1のガスディフューザー、第1の冷却チャネルパターン、又は第1のヒータのうちの一又は複数からの第1のガス流パターンを有する第1の処理ステーション;及び
第2のガスディフューザー、第2の冷却チャネルパターン、又は第2のヒータのうちの一又は複数からの第2のガス流パターンを有する第2の処理ステーション;
を含み、第2のガスディフューザー、第2の冷却チャネルパターン、又は第2のヒータが、第1のガスディフューザー、第1の冷却チャネルパターン、又は第1のヒータに対して回転又は並進移動して、第1のガス流パターンに対して補完的な第2のガス流パターンを提供し、第1のガスディフューザー、第1の冷却チャネルパターン、又は第1のヒータ、及び第2のガスディフューザー、第2の冷却チャネルパターン、又は第2のヒータのそれぞれが、n回対称性を有する対称的な孔パターンを有し、nが3から10の範囲の整数である、処理チャンバ。 - 第2のガスディフューザー、第2の冷却チャネルパターン、又は第2のヒータのうちの一又は複数が、第1のガスディフューザーに対して約(360/(n*2))度以下回転し、nが3から10の範囲の整数である、請求項1に記載の処理チャンバ。
- 第1の処理ステーション又は第2の処理ステーションのうちの一又は複数に接続されたコントローラをさらに含む、請求項1に記載の処理チャンバ。
- 膜を形成する方法であって、
少なくとも一つのウエハを基板支持表面上にロードすること;
第1のガスディフューザー、第1の冷却チャネルパターン、又は第1のヒータのうちの一又は複数からの第1のガス流パターンを有する第1の処理ステーションと、第2のガスディフューザー、第2の冷却チャネルパターン、又は第2のヒータのうちの一又は複数からの第2のガス流パターンを有する第2の処理ステーションとの間で基板支持表面を回転させることであって、第2のガスディフューザー、第2の冷却チャネルパターン、又は第2のヒータが、第1のガスディフューザー、第1の冷却チャネルパターン、又は第1のヒータに対して回転して、第1のガス流パターンに対して補完的な第2のガス流パターンを提供する、第1のステーションと第2のステーションとの間で基板支持表面を回転させること;及び
各処理ステーションで、少なくとも一つのウエハの上面を処理条件に曝露して、実質的に均一な厚さを有する膜を形成すること;
を含み、第1のガスディフューザー、第1の冷却チャネルパターン、又は第1のヒータ、及び第2のガスディフューザー、第2の冷却チャネルパターン、又は第2のヒータのそれぞれが、n回対称性を有する対称的な孔パターンを有し、nが3から10の範囲の整数である、方法。 - 膜が形成されるとき、少なくとも一つのウエハが静止している、請求項4に記載の方法。
- 第2のガスディフューザー、第2の冷却チャネルパターン、又は第2のヒータのうちの一又は複数が、第1のガスディフューザー、第1の冷却チャネルパターン、又は第1のヒータのうちの一又は複数に対して約(360/(n*2))度以下回転し、nが3から10の範囲の整数である、請求項5に記載の方法。
- 基板支持表面の回転速度を制御することをさらに含む、請求項4に記載の方法。
- 処理チャンバであって、
第1のプラズマ源からの第1のプラズマ流パターンを有する第1のプラズマ処理ステーションであって、第1のプラズマ源がn回対称性を有する対称的な孔パターンを有する、第1のプラズマ処理ステーションと;
第2のプラズマ源からの第2のプラズマ流パターンを有する第2のプラズマ処理ステーションであって、第2のプラズマ源がn回対称性を有する対称的な孔パターンを有し、第1のプラズマ源に対して回転して、第1のプラズマ流パターンに対して補完的な第2のプラズマ流パターンを提供する、第2のプラズマ処理ステーションと;
を含み、第2のプラズマ源が第1のプラズマ源に対して約(360/(n*2))以下回転し、nが2から10の範囲の整数である、処理チャンバ。
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US16/658,396 | 2019-10-21 | ||
US16/658,396 US11220747B2 (en) | 2018-10-29 | 2019-10-21 | Complementary pattern station designs |
PCT/US2019/057326 WO2020092047A1 (en) | 2018-10-29 | 2019-10-22 | Complementary pattern station designs |
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