JP7414080B2 - 弾性波デバイスおよびそれを備えたラダー型フィルタ - Google Patents

弾性波デバイスおよびそれを備えたラダー型フィルタ Download PDF

Info

Publication number
JP7414080B2
JP7414080B2 JP2021574152A JP2021574152A JP7414080B2 JP 7414080 B2 JP7414080 B2 JP 7414080B2 JP 2021574152 A JP2021574152 A JP 2021574152A JP 2021574152 A JP2021574152 A JP 2021574152A JP 7414080 B2 JP7414080 B2 JP 7414080B2
Authority
JP
Japan
Prior art keywords
resonator
value
electrode
electrode fingers
reflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021574152A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2021153734A5 (https=
JPWO2021153734A1 (https=
Inventor
健太郎 中村
真一 岡田
俊介 木戸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2021153734A1 publication Critical patent/JPWO2021153734A1/ja
Publication of JPWO2021153734A5 publication Critical patent/JPWO2021153734A5/ja
Application granted granted Critical
Publication of JP7414080B2 publication Critical patent/JP7414080B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/64Filters using surface acoustic waves
    • H03H9/6423Means for obtaining a particular transfer characteristic
    • H03H9/6433Coupled resonator filters
    • H03H9/6483Ladder SAW filters
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538Formation
    • H03H9/14541Multilayer finger or busbar electrode
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02543Characteristics of substrate, e.g. cutting angles
    • H03H9/02574Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02637Details concerning reflective or coupling arrays
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02818Means for compensation or elimination of undesirable effects
    • H03H9/02842Means for compensation or elimination of undesirable effects of reflections
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544Transducers of particular shape or position
    • H03H9/14547Fan shaped; Tilted; Shifted; Slanted; Tapered; Arched; Stepped finger transducers
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544Transducers of particular shape or position
    • H03H9/14594Plan-rotated or plan-tilted transducers
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25Constructional features of resonators using surface acoustic waves
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02637Details concerning reflective or coupling arrays
    • H03H9/02685Grating lines having particular arrangements
    • H03H9/02771Reflector banks

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2021574152A 2020-01-31 2021-01-29 弾性波デバイスおよびそれを備えたラダー型フィルタ Active JP7414080B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020015068 2020-01-31
JP2020015068 2020-01-31
PCT/JP2021/003249 WO2021153734A1 (ja) 2020-01-31 2021-01-29 弾性波デバイスおよびそれを備えたラダー型フィルタ

Publications (3)

Publication Number Publication Date
JPWO2021153734A1 JPWO2021153734A1 (https=) 2021-08-05
JPWO2021153734A5 JPWO2021153734A5 (https=) 2022-09-06
JP7414080B2 true JP7414080B2 (ja) 2024-01-16

Family

ID=77078230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021574152A Active JP7414080B2 (ja) 2020-01-31 2021-01-29 弾性波デバイスおよびそれを備えたラダー型フィルタ

Country Status (5)

Country Link
US (1) US12255635B2 (https=)
JP (1) JP7414080B2 (https=)
KR (1) KR102754581B1 (https=)
CN (1) CN115004547A (https=)
WO (1) WO2021153734A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023137769A1 (zh) * 2022-01-24 2023-07-27 华为技术有限公司 一种声学滤波器及电子设备
WO2023190654A1 (ja) * 2022-03-29 2023-10-05 株式会社村田製作所 弾性波装置
CN115694405B (zh) * 2022-11-16 2024-10-11 华中科技大学 一种产生挠曲电的结构和方法
US20240364305A1 (en) * 2023-04-06 2024-10-31 Skyworks Solutions, Inc. Acoustic wave device with interdigital transducer electrodes having two bus bars
KR102844660B1 (ko) * 2023-07-25 2025-08-11 (주)와이솔 질량 부가막이 전극 상에 형성된 표면 탄성파 필터
CN119602738B (zh) * 2024-10-28 2025-12-05 锐石创芯(重庆)微电子有限公司 声表面波器件及射频前端模组
CN121308715A (zh) * 2025-01-08 2026-01-09 锐石创芯(重庆)微电子有限公司 滤波器、射频前端模组和电子设备

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000224003A (ja) 1999-02-03 2000-08-11 Toyo Commun Equip Co Ltd 縦結合二重モードsawフィルタ
JP2007060331A (ja) 2005-08-25 2007-03-08 Seiko Epson Corp Saw共振子
JP2009273120A (ja) 2008-04-11 2009-11-19 Nippon Dempa Kogyo Co Ltd デュプレクサ
JP2010193135A (ja) 2009-02-18 2010-09-02 Epson Toyocom Corp Sawデバイス
JP2010263296A (ja) 2009-04-30 2010-11-18 Murata Mfg Co Ltd 弾性境界波装置
WO2014199683A1 (ja) 2013-06-13 2014-12-18 株式会社村田製作所 弾性表面波フィルタ、弾性表面波フィルタ装置およびデュプレクサ

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03283710A (ja) * 1990-03-30 1991-12-13 Toshiba Corp 弾性表面波共振子
JPH10303691A (ja) 1997-04-25 1998-11-13 Kyocera Corp 弾性表面波装置
JP2002176335A (ja) 2000-09-29 2002-06-21 Kyocera Corp 弾性表面波装置
JP5810113B2 (ja) * 2013-02-19 2015-11-11 スカイワークス・パナソニック フィルターソリューションズ ジャパン株式会社 弾性波共振器とこれを用いた弾性波フィルタおよびアンテナ共用器
JP2015029358A (ja) * 2014-10-29 2015-02-12 セイコーエプソン株式会社 弾性表面波共振子、弾性表面波発振器および電子機器
JP6750528B2 (ja) * 2016-04-21 2020-09-02 株式会社村田製作所 弾性波フィルタ装置
WO2018061878A1 (ja) * 2016-09-29 2018-04-05 株式会社村田製作所 弾性波装置、高周波フロントエンド回路および通信装置
WO2018168836A1 (ja) * 2017-03-15 2018-09-20 株式会社村田製作所 弾性波素子、弾性波フィルタ装置およびマルチプレクサ
JP2021132361A (ja) * 2020-02-21 2021-09-09 株式会社村田製作所 弾性波装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000224003A (ja) 1999-02-03 2000-08-11 Toyo Commun Equip Co Ltd 縦結合二重モードsawフィルタ
JP2007060331A (ja) 2005-08-25 2007-03-08 Seiko Epson Corp Saw共振子
JP2009273120A (ja) 2008-04-11 2009-11-19 Nippon Dempa Kogyo Co Ltd デュプレクサ
JP2010193135A (ja) 2009-02-18 2010-09-02 Epson Toyocom Corp Sawデバイス
JP2010263296A (ja) 2009-04-30 2010-11-18 Murata Mfg Co Ltd 弾性境界波装置
WO2014199683A1 (ja) 2013-06-13 2014-12-18 株式会社村田製作所 弾性表面波フィルタ、弾性表面波フィルタ装置およびデュプレクサ

Also Published As

Publication number Publication date
WO2021153734A1 (ja) 2021-08-05
KR20220112806A (ko) 2022-08-11
KR102754581B1 (ko) 2025-01-14
US12255635B2 (en) 2025-03-18
US20220352874A1 (en) 2022-11-03
CN115004547A (zh) 2022-09-02
JPWO2021153734A1 (https=) 2021-08-05

Similar Documents

Publication Publication Date Title
JP7414080B2 (ja) 弾性波デバイスおよびそれを備えたラダー型フィルタ
CN109600125B (zh) 滤波器
JP7472918B2 (ja) 弾性波デバイスおよびそれを備えたラダー型フィルタ
WO2018168836A1 (ja) 弾性波素子、弾性波フィルタ装置およびマルチプレクサ
US11863159B2 (en) Acoustic wave filter
JP7624796B2 (ja) ラダー型フィルタおよびマルチプレクサ
JP2014160888A (ja) 弾性波共振器とこれを用いた弾性波フィルタおよびアンテナ共用器
CN116868506A (zh) 弹性波滤波器以及多工器
US11855605B2 (en) Acoustic wave filter device and multiplexer
WO2022091582A1 (ja) 弾性波フィルタ
JP2023044392A (ja) 弾性波素子、弾性波フィルタ装置およびマルチプレクサ
WO2021085609A1 (ja) 弾性波フィルタ
JP7657515B2 (ja) ラダー型フィルタおよびマルチプレクサ
WO2023074373A1 (ja) 弾性波共振子、弾性波フィルタ装置およびマルチプレクサ
JPH10261935A (ja) 弾性表面波素子
US11863161B2 (en) Acoustic wave filter
JP2024104398A (ja) マルチプレクサ
JP2024157869A (ja) 弾性波素子、弾性波フィルタ装置およびマルチプレクサ
WO2023054301A1 (ja) 弾性波フィルタ装置およびマルチプレクサ
WO2023282328A1 (ja) 弾性波素子、弾性波フィルタ装置およびマルチプレクサ
WO2023090238A1 (ja) マルチプレクサ
JP2024072778A (ja) 弾性波デバイス、フィルタおよびマルチプレクサ
WO2022181578A1 (ja) 弾性波フィルタ
JP4506394B2 (ja) 一方向性弾性表面波変換器及びそれを用いた弾性表面波デバイス

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220707

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220707

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230926

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20231002

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20231128

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20231211

R150 Certificate of patent or registration of utility model

Ref document number: 7414080

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150