CN115004547A - 弹性波设备及具备该弹性波设备的梯型滤波器 - Google Patents

弹性波设备及具备该弹性波设备的梯型滤波器 Download PDF

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Publication number
CN115004547A
CN115004547A CN202180010904.0A CN202180010904A CN115004547A CN 115004547 A CN115004547 A CN 115004547A CN 202180010904 A CN202180010904 A CN 202180010904A CN 115004547 A CN115004547 A CN 115004547A
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CN
China
Prior art keywords
resonator
electrode fingers
electrode
elastic wave
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180010904.0A
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English (en)
Chinese (zh)
Inventor
中村健太郎
冈田真一
木户俊介
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN115004547A publication Critical patent/CN115004547A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6483—Ladder SAW filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02842—Means for compensation or elimination of undesirable effects of reflections
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14547—Fan shaped; Tilted; Shifted; Slanted; Tapered; Arched; Stepped finger transducers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14594—Plan-rotated or plan-tilted transducers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H03H9/02685—Grating lines having particular arrangements
    • H03H9/02771—Reflector banks

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
CN202180010904.0A 2020-01-31 2021-01-29 弹性波设备及具备该弹性波设备的梯型滤波器 Pending CN115004547A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020015068 2020-01-31
JP2020-015068 2020-01-31
PCT/JP2021/003249 WO2021153734A1 (ja) 2020-01-31 2021-01-29 弾性波デバイスおよびそれを備えたラダー型フィルタ

Publications (1)

Publication Number Publication Date
CN115004547A true CN115004547A (zh) 2022-09-02

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180010904.0A Pending CN115004547A (zh) 2020-01-31 2021-01-29 弹性波设备及具备该弹性波设备的梯型滤波器

Country Status (5)

Country Link
US (1) US12255635B2 (https=)
JP (1) JP7414080B2 (https=)
KR (1) KR102754581B1 (https=)
CN (1) CN115004547A (https=)
WO (1) WO2021153734A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119602738A (zh) * 2024-10-28 2025-03-11 锐石创芯(重庆)微电子有限公司 声表面波器件及射频前端模组
CN119628599A (zh) * 2025-01-08 2025-03-14 锐石创芯(重庆)微电子有限公司 滤波器、射频前端模组和电子设备

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023137769A1 (zh) * 2022-01-24 2023-07-27 华为技术有限公司 一种声学滤波器及电子设备
WO2023190654A1 (ja) * 2022-03-29 2023-10-05 株式会社村田製作所 弾性波装置
CN115694405B (zh) * 2022-11-16 2024-10-11 华中科技大学 一种产生挠曲电的结构和方法
US20240364305A1 (en) * 2023-04-06 2024-10-31 Skyworks Solutions, Inc. Acoustic wave device with interdigital transducer electrodes having two bus bars
KR102844660B1 (ko) * 2023-07-25 2025-08-11 (주)와이솔 질량 부가막이 전극 상에 형성된 표면 탄성파 필터

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014160888A (ja) * 2013-02-19 2014-09-04 Panasonic Corp 弾性波共振器とこれを用いた弾性波フィルタおよびアンテナ共用器
JP2015029358A (ja) * 2014-10-29 2015-02-12 セイコーエプソン株式会社 弾性表面波共振子、弾性表面波発振器および電子機器
KR20170120507A (ko) * 2016-04-21 2017-10-31 가부시키가이샤 무라타 세이사쿠쇼 탄성파 필터 장치
WO2018168836A1 (ja) * 2017-03-15 2018-09-20 株式会社村田製作所 弾性波素子、弾性波フィルタ装置およびマルチプレクサ
US20190245517A1 (en) * 2016-09-29 2019-08-08 Murata Manufacturing Co., Ltd. Acoustic wave device, radio frequency front-end circuit, and communication device

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JPH03283710A (ja) * 1990-03-30 1991-12-13 Toshiba Corp 弾性表面波共振子
JPH10303691A (ja) 1997-04-25 1998-11-13 Kyocera Corp 弾性表面波装置
JP2000224003A (ja) * 1999-02-03 2000-08-11 Toyo Commun Equip Co Ltd 縦結合二重モードｓａｗフィルタ
JP2002176335A (ja) 2000-09-29 2002-06-21 Kyocera Corp 弾性表面波装置
JP4411539B2 (ja) 2005-08-25 2010-02-10 セイコーエプソン株式会社 Ｓａｗ共振子
JP4734436B2 (ja) 2008-04-11 2011-07-27 日本電波工業株式会社 デュプレクサ
JP2010193135A (ja) * 2009-02-18 2010-09-02 Epson Toyocom Corp Ｓａｗデバイス
JP2010263296A (ja) * 2009-04-30 2010-11-18 Murata Mfg Co Ltd 弾性境界波装置
WO2014199683A1 (ja) * 2013-06-13 2014-12-18 株式会社村田製作所 弾性表面波フィルタ、弾性表面波フィルタ装置およびデュプレクサ
JP2021132361A (ja) * 2020-02-21 2021-09-09 株式会社村田製作所 弾性波装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014160888A (ja) * 2013-02-19 2014-09-04 Panasonic Corp 弾性波共振器とこれを用いた弾性波フィルタおよびアンテナ共用器
JP2015029358A (ja) * 2014-10-29 2015-02-12 セイコーエプソン株式会社 弾性表面波共振子、弾性表面波発振器および電子機器
KR20170120507A (ko) * 2016-04-21 2017-10-31 가부시키가이샤 무라타 세이사쿠쇼 탄성파 필터 장치
US20190245517A1 (en) * 2016-09-29 2019-08-08 Murata Manufacturing Co., Ltd. Acoustic wave device, radio frequency front-end circuit, and communication device
WO2018168836A1 (ja) * 2017-03-15 2018-09-20 株式会社村田製作所 弾性波素子、弾性波フィルタ装置およびマルチプレクサ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119602738A (zh) * 2024-10-28 2025-03-11 锐石创芯(重庆)微电子有限公司 声表面波器件及射频前端模组
CN119602738B (zh) * 2024-10-28 2025-12-05 锐石创芯(重庆)微电子有限公司 声表面波器件及射频前端模组
CN119628599A (zh) * 2025-01-08 2025-03-14 锐石创芯(重庆)微电子有限公司 滤波器、射频前端模组和电子设备
CN119628599B (zh) * 2025-01-08 2025-12-16 锐石创芯(重庆)微电子有限公司 滤波器、射频前端模组和电子设备

Also Published As

Publication number Publication date
WO2021153734A1 (ja) 2021-08-05
KR20220112806A (ko) 2022-08-11
KR102754581B1 (ko) 2025-01-14
JP7414080B2 (ja) 2024-01-16
US12255635B2 (en) 2025-03-18
US20220352874A1 (en) 2022-11-03
JPWO2021153734A1 (https=) 2021-08-05

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