JP7385400B2 - 真空用ゲートバルブ - Google Patents
真空用ゲートバルブ Download PDFInfo
- Publication number
- JP7385400B2 JP7385400B2 JP2019147617A JP2019147617A JP7385400B2 JP 7385400 B2 JP7385400 B2 JP 7385400B2 JP 2019147617 A JP2019147617 A JP 2019147617A JP 2019147617 A JP2019147617 A JP 2019147617A JP 7385400 B2 JP7385400 B2 JP 7385400B2
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- Prior art keywords
- valve
- valve body
- opening
- closing
- piston
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000007246 mechanism Effects 0.000 claims description 114
- 238000012856 packing Methods 0.000 claims description 53
- 238000007789 sealing Methods 0.000 description 56
- 238000003780 insertion Methods 0.000 description 37
- 230000037431 insertion Effects 0.000 description 37
- 239000003566 sealing material Substances 0.000 description 34
- 239000002245 particle Substances 0.000 description 17
- 230000009471 action Effects 0.000 description 13
- 230000000630 rising effect Effects 0.000 description 12
- 238000006073 displacement reaction Methods 0.000 description 11
- 230000036544 posture Effects 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 230000001965 increasing effect Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 230000006835 compression Effects 0.000 description 7
- 238000007906 compression Methods 0.000 description 7
- 239000000872 buffer Substances 0.000 description 6
- 230000000116 mitigating effect Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
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- 230000007257 malfunction Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
- F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
- F16K17/04—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side spring-loaded
- F16K17/0433—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side spring-loaded with vibration preventing means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/30—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces specially adapted for pressure containers
- F16K1/301—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces specially adapted for pressure containers only shut-off valves, i.e. valves without additional means
- F16K1/303—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces specially adapted for pressure containers only shut-off valves, i.e. valves without additional means with a valve member, e.g. stem or shaft, passing through the seat
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/04—Construction of housing; Use of materials therefor of sliding valves
- F16K27/041—Construction of housing; Use of materials therefor of sliding valves cylindrical slide valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/316—Guiding of the slide
- F16K3/3165—Guiding of the slide with rollers or balls
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Description
2 弁体開閉駆動体
2c 下部凹部面
3 46 ハウジング体
4 コイルスプリング(弾発部材)
5 カムローラ
6 49 支点ローラ
7 47 上下動作案内部
7a 48a ストッパ部
8 37 カム部材
9 35 シリンダ機構
10 シリンダヘッド(固定基部)
12 44 カム溝
12a 幅狭部(ストッパ部)
12e ブッシュ(クッション用弾性ブッシュ)
13 36 ピストンロッド
14 45 ピストン
15 38 ピストン軸受
21 固定側ガイド部材(動作ガイド機構)
21a 側面部(上下動作ガイド部)
21b 上端部(Lモーション動作ガイド部)
22 可動側ガイド部材(動作ガイド機構)
22a 側部(上下動作ガイド部)
22b 段部(Lモーション動作ガイド部)
25 弁体
26 弁体シール材
28 ステム
31 シール面
39 クッションパッキン(ピストンクッション機構)
40 14d 14e ロッド挿入部(ピストンクッション機構)
41 10d オリフィス
48 ローラ受け用弾性ブッシュ(クッション構造)
L1 開口ストローク
α 上下動作ガイド部
β Lモーション動作ガイド部
γ δ1 δ2 ピストンクッション機構
Claims (6)
- 対向配置したハウジング体と、このハウジング体の間に配置され、上下動作とLモーション動作を行う弁体開閉駆動体と、この弁体開閉駆動体の上部に弁体を設けたステムとを備え、各ハウジング体の内部には、シリンダ機構により上下動するピストンロッドと、このピストンロッドの上端にカム溝を有するカム部材を有し、前記弁体開閉駆動体の両側には、前記カム溝に摺動可能に案内されるカムローラと支点ローラとを有し、前記ハウジング体の内側には、前記支点ローラの上下動作を案内する上下動案内部と前記弁体開閉駆動体の上昇時に係止するストッパ部とを有し、前記弁体開閉駆動体の下部と固定側の前記ハウジング体のシリンダヘッドとの間に前記弁体開閉駆動体を開口ストロークの上端部まで上昇させるためのスプリングを備えたことを特徴とする真空用ゲートバルブ。
- 前記シリンダ機構の内部の弁閉側と弁開側には、クッションパッキンとオリフィスから成る減速用のピストンクッション機構が設けられている請求項1に記載の真空用ゲートバルブ。
- 前記シリンダ機構のカム溝の弁閉側のストッパ部には、クッション用弾性ブッシュが取り付けられ、更に、前記支点ローラの上下動を案内し上昇時に係止するストッパ部にはローラ受け用弾性ブッシュが取り付けられている請求項1に記載の真空用ゲートバルブ。
- 前記スプリングの上端は、前記弁体開閉駆動体の下部凹部面に取り付け、前記スプリングの下端は、前記ハウジング体のシリンダヘッドを固定基部とし、このシリンダヘッドに取り付けた請求項1に記載の真空用ゲートバルブ。
- 前記弁体開閉駆動体の両側と前記ハウジング体の内側に弁開閉動作の上下動作とLモーション動作を案内する動作ガイド機構を備えた請求項1に記載の真空用ゲートバルブ。
- 前記動作ガイド機構は、前記ハウジング体に設けた固定側ガイド部材と前記弁体開閉駆動体に設けた可動側ガイド部材より成る請求項5に記載の真空用ゲートバルブ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020190116868A KR102696189B1 (ko) | 2018-09-26 | 2019-09-23 | 진공용 게이트 밸브 |
US16/581,827 US11209092B2 (en) | 2018-09-26 | 2019-09-25 | Vacuum gate valve |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018180649 | 2018-09-26 | ||
JP2018180649 | 2018-09-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020056498A JP2020056498A (ja) | 2020-04-09 |
JP7385400B2 true JP7385400B2 (ja) | 2023-11-22 |
Family
ID=70106909
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019147617A Active JP7385400B2 (ja) | 2018-09-26 | 2019-08-09 | 真空用ゲートバルブ |
Country Status (3)
Country | Link |
---|---|
US (1) | US11209092B2 (ja) |
JP (1) | JP7385400B2 (ja) |
KR (1) | KR102696189B1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102019123563A1 (de) * | 2019-09-03 | 2021-03-04 | Vat Holding Ag | Vakuumventil für das Be- und/oder Entladen einer Vakuumkammer |
JP7479587B2 (ja) * | 2020-02-28 | 2024-05-09 | Smc株式会社 | ゲートバルブ |
JP7537329B2 (ja) * | 2021-03-19 | 2024-08-21 | Smc株式会社 | ぶれ防止機構付きゲートバルブ |
CN116181923B (zh) * | 2022-12-31 | 2023-10-27 | 宁波一机阀门制造有限公司 | 一种闸板阀 |
KR102574233B1 (ko) * | 2023-03-14 | 2023-09-04 | 주식회사 에스알티 | U motion 게이트밸브 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6173938B1 (en) | 1998-09-22 | 2001-01-16 | Applied Materials, Inc. | Two speed air cylinder for slit valve motion control |
JP2001165350A (ja) | 1999-12-03 | 2001-06-22 | Ulvac Japan Ltd | ゲ−トバルブおよび弁体の取付機構 |
JP2003156171A (ja) | 2001-11-21 | 2003-05-30 | Smc Corp | 初期排気弁 |
JP2004197769A (ja) | 2002-12-16 | 2004-07-15 | Smc Corp | ゲートバルブ |
WO2013161387A1 (ja) | 2012-04-23 | 2013-10-31 | Ckd株式会社 | リニアアクチュエータおよび真空制御装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5533839U (ja) | 1978-08-25 | 1980-03-04 | ||
JPS5546975Y2 (ja) | 1978-09-20 | 1980-11-05 | ||
JP2766190B2 (ja) * | 1994-07-28 | 1998-06-18 | 入江工研株式会社 | 無しゅう動真空ゲートバルブ |
JP3915083B2 (ja) * | 1998-05-20 | 2007-05-16 | Smc株式会社 | 高真空バルブ |
US6237892B1 (en) * | 2000-02-18 | 2001-05-29 | V Tex Corporation | Gate valve |
US7735804B2 (en) * | 2007-11-01 | 2010-06-15 | Highlight Tech Corp. | Sealing valve |
JP5365867B2 (ja) * | 2009-10-15 | 2013-12-11 | Smc株式会社 | ゲートバルブ |
JP5545152B2 (ja) * | 2010-09-22 | 2014-07-09 | Smc株式会社 | ゲートバルブ |
JP5712104B2 (ja) * | 2011-10-14 | 2015-05-07 | 株式会社キッツエスシーティー | 真空用ゲートバルブ |
JP5533839B2 (ja) | 2011-11-04 | 2014-06-25 | Smc株式会社 | 無摺動型ゲートバルブ |
JP5963091B2 (ja) * | 2013-07-10 | 2016-08-03 | Smc株式会社 | 無摺動型ゲートバルブ |
KR101784839B1 (ko) * | 2015-09-25 | 2017-11-06 | 프리시스 주식회사 | 양방향 게이트밸브 |
JP6774302B2 (ja) * | 2016-10-28 | 2020-10-21 | 株式会社キッツエスシーティー | 真空用ゲートバルブ |
-
2019
- 2019-08-09 JP JP2019147617A patent/JP7385400B2/ja active Active
- 2019-09-23 KR KR1020190116868A patent/KR102696189B1/ko active IP Right Grant
- 2019-09-25 US US16/581,827 patent/US11209092B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6173938B1 (en) | 1998-09-22 | 2001-01-16 | Applied Materials, Inc. | Two speed air cylinder for slit valve motion control |
JP2001165350A (ja) | 1999-12-03 | 2001-06-22 | Ulvac Japan Ltd | ゲ−トバルブおよび弁体の取付機構 |
JP2003156171A (ja) | 2001-11-21 | 2003-05-30 | Smc Corp | 初期排気弁 |
JP2004197769A (ja) | 2002-12-16 | 2004-07-15 | Smc Corp | ゲートバルブ |
WO2013161387A1 (ja) | 2012-04-23 | 2013-10-31 | Ckd株式会社 | リニアアクチュエータおよび真空制御装置 |
Also Published As
Publication number | Publication date |
---|---|
KR20200035358A (ko) | 2020-04-03 |
KR102696189B1 (ko) | 2024-08-20 |
JP2020056498A (ja) | 2020-04-09 |
US20200096127A1 (en) | 2020-03-26 |
US11209092B2 (en) | 2021-12-28 |
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