JP7330793B2 - （２００）結晶学的集合組織を有する窒化チタン膜を形成するための方法 - Google Patents

（２００）結晶学的集合組織を有する窒化チタン膜を形成するための方法 Download PDF

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JP7330793B2
JP7330793B2 JP2019136871A JP2019136871A JP7330793B2 JP 7330793 B2 JP7330793 B2 JP 7330793B2 JP 2019136871 A JP2019136871 A JP 2019136871A JP 2019136871 A JP2019136871 A JP 2019136871A JP 7330793 B2 JP7330793 B2 JP 7330793B2
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titanium nitride
nitride film
plasma
monolayer
gas
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JP2020015980A (ja
JP2020015980A5 (enExample
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タピリー カンダバラ
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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